Growth behavior and characteristics of one dimensional ZnO nanostructures by metalorganic chemical vapor deposition

The ZnO nanorods have been grown on silicon substrates by a metalorganic chemical vapor deposition (MOCVD) process with/without Au catalytic layer. The growth behavior of ZnO nanorods changed with the catalytic layer. The presence of Au catalyst complicated the growth direction of ZnO nanorods in the MOCVD methods. The ZnO nanorods had single crystalline atomic structure and pure compositions without impurities and strong and narrow excitonic emission. We investigated the growth behavior of the ZnO nanostructures which are leading candidate for optical applications.