@inproceedings{5a6e39b5a37749ec8025c90f8a2e4c8d,
title = "Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching",
abstract = "In this paper, we show two methods for modifying the design of a Disk Resonating Gyroscope (DRG) to compensate for the mechanical anisotropy in single crystal silicon. This method is validated through experimental characterization of more than 70 different devices. With the proposed methods, the frequency split of the 250kHz DRG wineglass modes in single crystal silicon was reduced from >10kHz to as los as 96Hz without any electrostatic tuning. These results allow development of high-performance miniature DRGs tuned for degenerate-mode operation from high-quality crystalline silicon material.",
keywords = "(100) single crystal silicon, anisotropy, frequency split, gyroscope, mode-matching",
author = "Ahn, \{C. H.\} and Ng, \{E. J.\} and Hong, \{V. A.\} and Y. Yang and Lee, \{B. J.\} and Ward, \{M. W.\} and Kenny, \{T. W.\}",
year = "2013",
doi = "10.1109/Transducers.2013.6627119",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "1723--1726",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}