Functional microscopy tip fabrication by an electric conductive nanowire

Joondong Kim; Ju Hyung Yun; Moon Seop Hyun; Young Hyun Shin; Yun Chang Park; Ji Hye Lee; Sohee Jeong; Chang Soo Han

doi:10.1166/jnn.2010.2267

Functional microscopy tip fabrication by an electric conductive nanowire

Joondong Kim
, Ju Hyung Yun
, Moon Seop Hyun
, Young Hyun Shin
, Yun Chang Park
, Ji Hye Lee
, Sohee Jeong
, Chang Soo Han

Research output: Contribution to journal › Article › peer-review

Abstract

The functional microscopy tip was fabricated by an electric conductive nanowire (NW). Single crystalline nickel suicide (NiSi) NW grown by plasma-enhanced chemical vapor deposition has an excellent electrical conductivity. On behalf of the advantages in tiny size and conductivity of NiSi NW, it was utilized as a nanoscale probe. Dielectrophoretic method was applied to position the NW. The NiSi NW containing solution was dropped in an ac electric field applying system to align the NiSi NW on a Si cantilever. The fabricated NiSi NW-sitting functional microscopy tip obtained the information of topography and electrical signals from a nanoscale structure. It shows the high potential of nanoscale microscopy tip fabrication at reduced processing steps.

Original language	English
Pages (from-to)	3207-3210
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	10
Issue number	5
DOIs	https://doi.org/10.1166/jnn.2010.2267
State	Published - May 2010
Externally published	Yes

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

Dielectrophoresis (DEP)
Functional microscopy tip
Nanoscale information
Nickel silicide nanowire (NiSi NW)
Plasma enhanced chemical vapor deposition (PECVD)

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10.1166/jnn.2010.2267

Cite this

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title = "Functional microscopy tip fabrication by an electric conductive nanowire",

abstract = "The functional microscopy tip was fabricated by an electric conductive nanowire (NW). Single crystalline nickel suicide (NiSi) NW grown by plasma-enhanced chemical vapor deposition has an excellent electrical conductivity. On behalf of the advantages in tiny size and conductivity of NiSi NW, it was utilized as a nanoscale probe. Dielectrophoretic method was applied to position the NW. The NiSi NW containing solution was dropped in an ac electric field applying system to align the NiSi NW on a Si cantilever. The fabricated NiSi NW-sitting functional microscopy tip obtained the information of topography and electrical signals from a nanoscale structure. It shows the high potential of nanoscale microscopy tip fabrication at reduced processing steps.",

keywords = "Dielectrophoresis (DEP), Functional microscopy tip, Nanoscale information, Nickel silicide nanowire (NiSi NW), Plasma enhanced chemical vapor deposition (PECVD)",

author = "Joondong Kim and Yun, \{Ju Hyung\} and Hyun, \{Moon Seop\} and Shin, \{Young Hyun\} and Park, \{Yun Chang\} and Lee, \{Ji Hye\} and Sohee Jeong and Han, \{Chang Soo\}",

year = "2010",

month = may,

doi = "10.1166/jnn.2010.2267",

language = "English",

volume = "10",

pages = "3207--3210",

journal = "Journal of Nanoscience and Nanotechnology",

issn = "1533-4880",

publisher = "American Scientific Publishers",

number = "5",

}

TY - JOUR

T1 - Functional microscopy tip fabrication by an electric conductive nanowire

AU - Kim, Joondong

AU - Yun, Ju Hyung

AU - Hyun, Moon Seop

AU - Shin, Young Hyun

AU - Park, Yun Chang

AU - Lee, Ji Hye

AU - Jeong, Sohee

AU - Han, Chang Soo

PY - 2010/5

Y1 - 2010/5

N2 - The functional microscopy tip was fabricated by an electric conductive nanowire (NW). Single crystalline nickel suicide (NiSi) NW grown by plasma-enhanced chemical vapor deposition has an excellent electrical conductivity. On behalf of the advantages in tiny size and conductivity of NiSi NW, it was utilized as a nanoscale probe. Dielectrophoretic method was applied to position the NW. The NiSi NW containing solution was dropped in an ac electric field applying system to align the NiSi NW on a Si cantilever. The fabricated NiSi NW-sitting functional microscopy tip obtained the information of topography and electrical signals from a nanoscale structure. It shows the high potential of nanoscale microscopy tip fabrication at reduced processing steps.

AB - The functional microscopy tip was fabricated by an electric conductive nanowire (NW). Single crystalline nickel suicide (NiSi) NW grown by plasma-enhanced chemical vapor deposition has an excellent electrical conductivity. On behalf of the advantages in tiny size and conductivity of NiSi NW, it was utilized as a nanoscale probe. Dielectrophoretic method was applied to position the NW. The NiSi NW containing solution was dropped in an ac electric field applying system to align the NiSi NW on a Si cantilever. The fabricated NiSi NW-sitting functional microscopy tip obtained the information of topography and electrical signals from a nanoscale structure. It shows the high potential of nanoscale microscopy tip fabrication at reduced processing steps.

KW - Dielectrophoresis (DEP)

KW - Functional microscopy tip

KW - Nanoscale information

KW - Nickel silicide nanowire (NiSi NW)

KW - Plasma enhanced chemical vapor deposition (PECVD)

UR - https://www.scopus.com/pages/publications/77954988273

U2 - 10.1166/jnn.2010.2267

DO - 10.1166/jnn.2010.2267

M3 - Article

AN - SCOPUS:77954988273

SN - 1533-4880

VL - 10

SP - 3207

EP - 3210

JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

IS - 5

ER -

Functional microscopy tip fabrication by an electric conductive nanowire

Abstract

UN SDGs

Keywords

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