TY - GEN
T1 - Friction monitoring of conventional diamond conditioner and its application
AU - Kim, Hojoong
AU - Lim, Donghyun
AU - Lee, Byungil
AU - Hwang, Hasub
AU - Jang, Sunjae
AU - Kim, Taesung
N1 - Publisher Copyright:
© 2015 American Vacuum Society.
PY - 2016/2/17
Y1 - 2016/2/17
N2 - One of the major issues of the conventional diamond conditioners is performance inconsistency along consumables lifetime. Thus, optimization of process control for the conventional conditioners is strongly recommended to overcome the performance issues. In present study, investigations on friction signal of the conventional conditioners were performed. Then, a correlation between performance of pad conditioning and friction signal had been made. Finally, an application of the relationship to extend pad lifetime while maintaining polishing performance was suggested.
AB - One of the major issues of the conventional diamond conditioners is performance inconsistency along consumables lifetime. Thus, optimization of process control for the conventional conditioners is strongly recommended to overcome the performance issues. In present study, investigations on friction signal of the conventional conditioners were performed. Then, a correlation between performance of pad conditioning and friction signal had been made. Finally, an application of the relationship to extend pad lifetime while maintaining polishing performance was suggested.
UR - https://www.scopus.com/pages/publications/84964491088
M3 - Conference contribution
AN - SCOPUS:84964491088
T3 - 2015 International Conference on Planarization/CMP Technology, ICPT 2015
BT - 2015 International Conference on Planarization/CMP Technology, ICPT 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - International Conference on Planarization/CMP Technology, ICPT 2015
Y2 - 30 September 2015 through 2 October 2015
ER -