Abstract
Applying voltage between the conductive tip in atomic force microscopy (AFM) and bottom electrode through Pb(Zr,Ti)O3 (PZT) films can cause switching of ferroelectric domains. Formation and imaging of ferroelectric domains in nanometer scale could be applied to develop the future ultrahigh-density memory device. Relevant issues, i.e. bit (induced ferroelectric domains) size dependence on applied voltage and pulse width, are discussed. The bit size showed a log-linear dependence on the pulse width and a linear dependence on the pulse voltage. Using the analysis of electric field distribution, the size of the induced bits under certain pulse voltage and width was estimated.
| Original language | English |
|---|---|
| Pages (from-to) | 163-171 |
| Number of pages | 9 |
| Journal | Integrated Ferroelectrics |
| Volume | 31 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - 2000 |
| Externally published | Yes |
| Event | 12th International Symposium on Integrated Ferroelectrics - Aachen, Germany Duration: 12 Mar 2000 → 15 Mar 2000 |
Keywords
- Atomic force microscopy
- Coercive field
- Domains size
- Electric field analysis
- Ferroelectric films
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