Formation of ferroelectric nano-domains using scanning force microscopy for the future application of memory devices

  • H. Shin
  • , J. Woo
  • , S. Hong
  • , J. U. Jeon
  • , Y. E. Pak
  • , K. No

Research output: Contribution to journalConference articlepeer-review

Abstract

Applying voltage between the conductive tip in atomic force microscopy (AFM) and bottom electrode through Pb(Zr,Ti)O3 (PZT) films can cause switching of ferroelectric domains. Formation and imaging of ferroelectric domains in nanometer scale could be applied to develop the future ultrahigh-density memory device. Relevant issues, i.e. bit (induced ferroelectric domains) size dependence on applied voltage and pulse width, are discussed. The bit size showed a log-linear dependence on the pulse width and a linear dependence on the pulse voltage. Using the analysis of electric field distribution, the size of the induced bits under certain pulse voltage and width was estimated.

Original languageEnglish
Pages (from-to)163-171
Number of pages9
JournalIntegrated Ferroelectrics
Volume31
Issue number1-4
DOIs
StatePublished - 2000
Externally publishedYes
Event12th International Symposium on Integrated Ferroelectrics - Aachen, Germany
Duration: 12 Mar 200015 Mar 2000

Keywords

  • Atomic force microscopy
  • Coercive field
  • Domains size
  • Electric field analysis
  • Ferroelectric films

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