Flexible Sensor Platform: Nano-grain of 2D Heterostructure by Cold-Plasma

Materials with high mechanical flexibility and sensitivity are suitable for fabricating flexible electrodes. Two-dimensional (2D) transition metal dichalcogenides (TMDs) are flexible and have the desired chemical, physical, and electrical properties. However, the conventional methods, mechanical transfer, the hydrothermal process, and chemical vapor deposition, have a few limitations. The batch production of 2D TMDs for flexible sensor applications is difficult because of low yield and reproducibility, high temperature attained during the process, and micro-scale-production-related complications. In this study, we develop a cold-plasma-based 2D heterostructure synthesis process for the direct fabrication of flexible polyimides useful for mass production. The usage of ionized gas considerably reduces the process temperature. Furthermore, plasma sulfurization induces multiple crystallizations, making the nanograin structures an active site for highly sensitive sensors. This universal synthetic method for flexible biosensor platforms based on the cold-plasma process is suitable for future sensor applications.