Flexible Carbon-rich Al2O3 Interlayers for Moisture Barrier Films by a Spatially-Resolved Atomic Layer Deposition Process

Sang Heon Yong; Sun Jung Kim; Jang Soon Park; Sung Min Cho; Hyung June Ahn; Heeyeop Chae

doi:10.3938/jkps.73.40

Flexible Carbon-rich Al₂O₃ Interlayers for Moisture Barrier Films by a Spatially-Resolved Atomic Layer Deposition Process

Sang Heon Yong
, Sun Jung Kim
, Jang Soon Park
, Sung Min Cho
, Hyung June Ahn
, Heeyeop Chae

Department of Chemical Engineering

Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

In this study, we developed effective carbon-rich Al₂O₃ interlayers for flexible moisture barrier films. The carbon-rich Al₂O₃ films were deposited with excessive supply of trimethylaluminum (TMA) precursor. The five-layer structure was made with alternate layers of low-carbon Al₂O₃ and carbon-rich Al₂O₃ and the water vapor transmission rate (WVTR) of 3.3 × 10 ⁻⁴ g/(m²·day) was demonstrated. The WVTR of the multilayer films is reduced by 36% compared to 25 nm thick single Al₂O₃ barrier film. The WVTR of the five-layer film shows increase of 86% after 1,000 bending at a 1.5 cm radius, while single Al₂O₃ thin films increased by 367%.

Original language	English
Pages (from-to)	40-44
Number of pages	5
Journal	Journal of the Korean Physical Society
Volume	73
Issue number	1
DOIs	https://doi.org/10.3938/jkps.73.40
State	Published - 1 Jul 2018

Keywords

Carbon-rich AlO Interlayer
Encapsulation
Flexible Multilayer Films
Moisture Multilayer Barrier Films

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10.3938/jkps.73.40

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title = "Flexible Carbon-rich Al2O3 Interlayers for Moisture Barrier Films by a Spatially-Resolved Atomic Layer Deposition Process",

abstract = "In this study, we developed effective carbon-rich Al2O3 interlayers for flexible moisture barrier films. The carbon-rich Al2O3 films were deposited with excessive supply of trimethylaluminum (TMA) precursor. The five-layer structure was made with alternate layers of low-carbon Al2O3 and carbon-rich Al2O3 and the water vapor transmission rate (WVTR) of 3.3 × 10 −4 g/(m2·day) was demonstrated. The WVTR of the multilayer films is reduced by 36\% compared to 25 nm thick single Al2O3 barrier film. The WVTR of the five-layer film shows increase of 86\% after 1,000 bending at a 1.5 cm radius, while single Al2O3 thin films increased by 367\%.",

keywords = "Carbon-rich AlO Interlayer, Encapsulation, Flexible Multilayer Films, Moisture Multilayer Barrier Films",

author = "Yong, \{Sang Heon\} and Kim, \{Sun Jung\} and Park, \{Jang Soon\} and Cho, \{Sung Min\} and Ahn, \{Hyung June\} and Heeyeop Chae",

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doi = "10.3938/jkps.73.40",

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AU - Yong, Sang Heon

AU - Kim, Sun Jung

AU - Park, Jang Soon

AU - Cho, Sung Min

AU - Ahn, Hyung June

AU - Chae, Heeyeop

PY - 2018/7/1

Y1 - 2018/7/1

N2 - In this study, we developed effective carbon-rich Al2O3 interlayers for flexible moisture barrier films. The carbon-rich Al2O3 films were deposited with excessive supply of trimethylaluminum (TMA) precursor. The five-layer structure was made with alternate layers of low-carbon Al2O3 and carbon-rich Al2O3 and the water vapor transmission rate (WVTR) of 3.3 × 10 −4 g/(m2·day) was demonstrated. The WVTR of the multilayer films is reduced by 36% compared to 25 nm thick single Al2O3 barrier film. The WVTR of the five-layer film shows increase of 86% after 1,000 bending at a 1.5 cm radius, while single Al2O3 thin films increased by 367%.

AB - In this study, we developed effective carbon-rich Al2O3 interlayers for flexible moisture barrier films. The carbon-rich Al2O3 films were deposited with excessive supply of trimethylaluminum (TMA) precursor. The five-layer structure was made with alternate layers of low-carbon Al2O3 and carbon-rich Al2O3 and the water vapor transmission rate (WVTR) of 3.3 × 10 −4 g/(m2·day) was demonstrated. The WVTR of the multilayer films is reduced by 36% compared to 25 nm thick single Al2O3 barrier film. The WVTR of the five-layer film shows increase of 86% after 1,000 bending at a 1.5 cm radius, while single Al2O3 thin films increased by 367%.

KW - Carbon-rich AlO Interlayer

KW - Encapsulation

KW - Flexible Multilayer Films

KW - Moisture Multilayer Barrier Films

UR - https://www.scopus.com/pages/publications/85049755693

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DO - 10.3938/jkps.73.40

M3 - Article

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JF - Journal of the Korean Physical Society

IS - 1

ER -

Flexible Carbon-rich Al₂O₃ Interlayers for Moisture Barrier Films by a Spatially-Resolved Atomic Layer Deposition Process

Abstract

Keywords

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