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Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

  • Electronics and Telecommunications Research Institute
  • Incheon National University
  • Korea University

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1357-1360
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number4
DOIs
StatePublished - 2003
Externally publishedYes

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