Abstract
Using microwave plasma-enhanced chemical vapor deposition, diamond films were grown on Ti-coated glass substrates at low temperatures around 500 °C on behalf of the practical application for field emitters. Electron emission was observed at a turn-on field as low as 11 V/μm. Field emission characteristics were discussed in terms of crystalline qualities, surface morphologies, and electrical properties of diamond films.
| Original language | English |
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| Pages | 218-219 |
| Number of pages | 2 |
| State | Published - 1998 |
| Externally published | Yes |
| Event | Proceedings of the 1998 11th International Vacuum Microelectronics Conference, IVMC - Asheville, NC, USA Duration: 19 Jul 1998 → 24 Jul 1998 |
Conference
| Conference | Proceedings of the 1998 11th International Vacuum Microelectronics Conference, IVMC |
|---|---|
| City | Asheville, NC, USA |
| Period | 19/07/98 → 24/07/98 |
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