Field effect resistor, a single-device-at-pad solution for ESD protection in deeply scaled SOI technology

Shuqing Cao; Akram A. Salman; Jung Hoon Chun; Stephen G. Beebe; Mario M. Pelella; Robert W. Dutton

doi:10.1109/SOI.2010.5641373

Field effect resistor, a single-device-at-pad solution for ESD protection in deeply scaled SOI technology

Shuqing Cao
, Akram A. Salman
, Jung Hoon Chun
, Stephen G. Beebe
, Mario M. Pelella
, Robert W. Dutton

Department of Semiconductor Systems Engineering

Stanford University
Texas Instruments
Global Foundries, Inc.
Tau-Metrix, Inc.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Original language	English
Title of host publication	2010 IEEE International SOI Conference, SOI 2010
DOIs	https://doi.org/10.1109/SOI.2010.5641373
State	Published - 2010
Event	2010 IEEE International Silicon on Insulator Conference, SOI 2010 - San Diego, CA, United States Duration: 11 Oct 2010 → 14 Oct 2010

Publication series

Name	Proceedings - IEEE International SOI Conference
ISSN (Print)	1078-621X

Conference

Conference	2010 IEEE International Silicon on Insulator Conference, SOI 2010
Country/Territory	United States
City	San Diego, CA
Period	11/10/10 → 14/10/10

Access to Document

10.1109/SOI.2010.5641373

Cite this

@inproceedings{5e1932485db54f4eadefe2ebf591bd5b,

title = "Field effect resistor, a single-device-at-pad solution for ESD protection in deeply scaled SOI technology",

author = "Shuqing Cao and Salman, \{Akram A.\} and Chun, \{Jung Hoon\} and Beebe, \{Stephen G.\} and Pelella, \{Mario M.\} and Dutton, \{Robert W.\}",

year = "2010",

doi = "10.1109/SOI.2010.5641373",

language = "English",

isbn = "9781424491285",

series = "Proceedings - IEEE International SOI Conference",

booktitle = "2010 IEEE International SOI Conference, SOI 2010",

note = "2010 IEEE International Silicon on Insulator Conference, SOI 2010 ; Conference date: 11-10-2010 Through 14-10-2010",

}

Cao, S, Salman, AA, Chun, JH, Beebe, SG, Pelella, MM & Dutton, RW 2010, Field effect resistor, a single-device-at-pad solution for ESD protection in deeply scaled SOI technology. in 2010 IEEE International SOI Conference, SOI 2010., 5641373, Proceedings - IEEE International SOI Conference, 2010 IEEE International Silicon on Insulator Conference, SOI 2010, San Diego, CA, United States, 11/10/10. https://doi.org/10.1109/SOI.2010.5641373

Field effect resistor, a single-device-at-pad solution for ESD protection in deeply scaled SOI technology. / Cao, Shuqing; Salman, Akram A.; Chun, Jung Hoon et al.
2010 IEEE International SOI Conference, SOI 2010. 2010. 5641373 (Proceedings - IEEE International SOI Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Field effect resistor, a single-device-at-pad solution for ESD protection in deeply scaled SOI technology

AU - Cao, Shuqing

AU - Salman, Akram A.

AU - Chun, Jung Hoon

AU - Beebe, Stephen G.

AU - Pelella, Mario M.

AU - Dutton, Robert W.

PY - 2010

Y1 - 2010

UR - https://www.scopus.com/pages/publications/78650554248

U2 - 10.1109/SOI.2010.5641373

DO - 10.1109/SOI.2010.5641373

M3 - Conference contribution

AN - SCOPUS:78650554248

SN - 9781424491285

T3 - Proceedings - IEEE International SOI Conference

BT - 2010 IEEE International SOI Conference, SOI 2010

T2 - 2010 IEEE International Silicon on Insulator Conference, SOI 2010

Y2 - 11 October 2010 through 14 October 2010

ER -

Field effect resistor, a single-device-at-pad solution for ESD protection in deeply scaled SOI technology

Publication series

Conference

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