Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems

Eunsu Jang; Sang Min Park; Byoung Kuk Lee

doi:10.1109/APEC39645.2020.9124122

Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems

Eunsu Jang
, Sang Min Park
, Byoung Kuk Lee

Sungkyunkwan University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This study presents a design method of resonant network for the superheated steam (SHS) generator using induction heating (IH) method. In order to generate the pure SHS, a heating object composed of titanium (Ti) grade 2 is used. Thus, to facilitate the IH, the analysis of SHS and Ti-load characteristics should be performed. Based on the analysis results, feasible resonant networks are reviewed and designed in consideration of several conditions for Ti-load. Through the simulation and experimental results of the 2.2-kW prototype for each resonant network, the resonant network suitable for SHS generator is recommended. Finally, the validity of the design method of the resonant network is verified.

Original language	English
Title of host publication	APEC 2020 - 35th Annual IEEE Applied Power Electronics Conference and Exposition
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	2758-2762
Number of pages	5
ISBN (Electronic)	9781728148298
DOIs	https://doi.org/10.1109/APEC39645.2020.9124122
State	Published - Mar 2020
Externally published	Yes
Event	35th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2020 - New Orleans, United States Duration: 15 Mar 2020 → 19 Mar 2020

Publication series

Name	Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC
Volume	2020-March

Conference

Conference	35th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2020
Country/Territory	United States
City	New Orleans
Period	15/03/20 → 19/03/20

Keywords

induction heating (IH)
resonant network
superheated steam generator

Access to Document

10.1109/APEC39645.2020.9124122

Cite this

Jang, E., Park, S. M., & Kuk Lee, B. (2020). Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems. In APEC 2020 - 35th Annual IEEE Applied Power Electronics Conference and Exposition (pp. 2758-2762). Article 9124122 (Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC; Vol. 2020-March). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APEC39645.2020.9124122

Jang, Eunsu ; Park, Sang Min ; Kuk Lee, Byoung. / Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems. APEC 2020 - 35th Annual IEEE Applied Power Electronics Conference and Exposition. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 2758-2762 (Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC).

@inproceedings{2927f05586da431c87b8dd304ab817fe,

title = "Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems",

abstract = "This study presents a design method of resonant network for the superheated steam (SHS) generator using induction heating (IH) method. In order to generate the pure SHS, a heating object composed of titanium (Ti) grade 2 is used. Thus, to facilitate the IH, the analysis of SHS and Ti-load characteristics should be performed. Based on the analysis results, feasible resonant networks are reviewed and designed in consideration of several conditions for Ti-load. Through the simulation and experimental results of the 2.2-kW prototype for each resonant network, the resonant network suitable for SHS generator is recommended. Finally, the validity of the design method of the resonant network is verified.",

keywords = "induction heating (IH), resonant network, superheated steam generator",

author = "Eunsu Jang and Park, \{Sang Min\} and \{Kuk Lee\}, Byoung",

note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 35th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2020 ; Conference date: 15-03-2020 Through 19-03-2020",

year = "2020",

month = mar,

doi = "10.1109/APEC39645.2020.9124122",

language = "English",

series = "Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "2758--2762",

booktitle = "APEC 2020 - 35th Annual IEEE Applied Power Electronics Conference and Exposition",

}

Jang, E, Park, SM & Kuk Lee, B 2020, Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems. in APEC 2020 - 35th Annual IEEE Applied Power Electronics Conference and Exposition., 9124122, Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC, vol. 2020-March, Institute of Electrical and Electronics Engineers Inc., pp. 2758-2762, 35th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2020, New Orleans, United States, 15/03/20. https://doi.org/10.1109/APEC39645.2020.9124122

Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems. / Jang, Eunsu; Park, Sang Min; Kuk Lee, Byoung.
APEC 2020 - 35th Annual IEEE Applied Power Electronics Conference and Exposition. Institute of Electrical and Electronics Engineers Inc., 2020. p. 2758-2762 9124122 (Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC; Vol. 2020-March).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems

AU - Jang, Eunsu

AU - Park, Sang Min

AU - Kuk Lee, Byoung

PY - 2020/3

Y1 - 2020/3

N2 - This study presents a design method of resonant network for the superheated steam (SHS) generator using induction heating (IH) method. In order to generate the pure SHS, a heating object composed of titanium (Ti) grade 2 is used. Thus, to facilitate the IH, the analysis of SHS and Ti-load characteristics should be performed. Based on the analysis results, feasible resonant networks are reviewed and designed in consideration of several conditions for Ti-load. Through the simulation and experimental results of the 2.2-kW prototype for each resonant network, the resonant network suitable for SHS generator is recommended. Finally, the validity of the design method of the resonant network is verified.

AB - This study presents a design method of resonant network for the superheated steam (SHS) generator using induction heating (IH) method. In order to generate the pure SHS, a heating object composed of titanium (Ti) grade 2 is used. Thus, to facilitate the IH, the analysis of SHS and Ti-load characteristics should be performed. Based on the analysis results, feasible resonant networks are reviewed and designed in consideration of several conditions for Ti-load. Through the simulation and experimental results of the 2.2-kW prototype for each resonant network, the resonant network suitable for SHS generator is recommended. Finally, the validity of the design method of the resonant network is verified.

KW - induction heating (IH)

KW - resonant network

KW - superheated steam generator

UR - https://www.scopus.com/pages/publications/85087785034

U2 - 10.1109/APEC39645.2020.9124122

DO - 10.1109/APEC39645.2020.9124122

M3 - Conference contribution

AN - SCOPUS:85087785034

T3 - Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC

SP - 2758

EP - 2762

BT - APEC 2020 - 35th Annual IEEE Applied Power Electronics Conference and Exposition

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 35th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2020

Y2 - 15 March 2020 through 19 March 2020

ER -

Jang E, Park SM, Kuk Lee B. Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems. In APEC 2020 - 35th Annual IEEE Applied Power Electronics Conference and Exposition. Institute of Electrical and Electronics Engineers Inc. 2020. p. 2758-2762. 9124122. (Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC). doi: 10.1109/APEC39645.2020.9124122

Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this