Abstract
We report on the fabrication and characterization of a Ga2O3-based UV-C photodetector using the aerosol deposition (AD) method. By optimizing the size and crystallinity of the Ga2O3 powder, we were able to obtain a uniform thin film with high transmittance (70–80%) without the need for additional heat treatment or high vacuum environments. The resulting Ga2O3 film exhibited a high and selective response to 254 nm wavelength light, even without any treatment, and remained stable when exposed to γ-radiation. The photodetector also performed well in extreme temperatures (−196 °C–150 °C), making it suitable for use in harsh environments, such as the space industry. Our findings demonstrate the potential of the AD method for the fabrication of high-quality Ga2O3 thin films for photodetector applications.
| Original language | English |
|---|---|
| Pages (from-to) | 30375-30380 |
| Number of pages | 6 |
| Journal | Ceramics International |
| Volume | 49 |
| Issue number | 18 |
| DOIs | |
| State | Published - 15 Sep 2023 |
Keywords
- Aerosol deposition
- Extreme environment
- GaO thin film
- UV-C
- γ-radiation