Fabrication of titania nanopoles by nanoporous alumina template

Hyun Jung Her, Jung Min Kim, Jaewan Kim, Y. J. Choi, C. J. Kang, Yong Sang Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

We demonstrate a formation of thin film titania (TiO2) with dense array of nanopoles and nanopores. The heights of poles and pores are 180 nm and 130 nm, respectively. In order to get titania nanopoles and nanopores, we make a nanoporous alumina (Al2O3) template through a two-step anodization process, which is essential for the uniform and densified nanopores on aluminum surface. Nano-structured titania films were spin-coated under sol-gel state. The spin-coated titania films were then uniformly patterned by nanoimprinting lithography technique with textured PMMA mold or nanoporous alumina template. These fabricated titania films are very useful for solar cells, photocatalytic and sensing applications wherein nano-structuring of surface with controlled dimensions are vital.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages788-791
Number of pages4
DOIs
StatePublished - 2007
Externally publishedYes
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: 16 Jan 200719 Jan 2007

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Conference

Conference2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Country/TerritoryThailand
CityBangkok
Period16/01/0719/01/07

Keywords

  • Nanopoles titania
  • Nanopores titania
  • Nanoporous alumina template

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