@inproceedings{541694b78a6b417fb2839b9abb75d821,
title = "Fabrication of titania nanopoles by nanoporous alumina template",
abstract = "We demonstrate a formation of thin film titania (TiO2) with dense array of nanopoles and nanopores. The heights of poles and pores are 180 nm and 130 nm, respectively. In order to get titania nanopoles and nanopores, we make a nanoporous alumina (Al2O3) template through a two-step anodization process, which is essential for the uniform and densified nanopores on aluminum surface. Nano-structured titania films were spin-coated under sol-gel state. The spin-coated titania films were then uniformly patterned by nanoimprinting lithography technique with textured PMMA mold or nanoporous alumina template. These fabricated titania films are very useful for solar cells, photocatalytic and sensing applications wherein nano-structuring of surface with controlled dimensions are vital.",
keywords = "Nanopoles titania, Nanopores titania, Nanoporous alumina template",
author = "Her, \{Hyun Jung\} and Kim, \{Jung Min\} and Jaewan Kim and Choi, \{Y. J.\} and Kang, \{C. J.\} and Kim, \{Yong Sang\}",
year = "2007",
doi = "10.1109/NEMS.2007.352135",
language = "English",
isbn = "1424406102",
series = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",
pages = "788--791",
booktitle = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",
note = "2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 ; Conference date: 16-01-2007 Through 19-01-2007",
}