@inproceedings{d2ed6edd4b144eb4a583be669b4e44cd,
title = "Fabrication of organic-inorganic hybrid moisture-barrier film for OLEDs",
abstract = "We fabricated moisture-barrier films using ALD and plasma enhanced CVD method for OELD encapsulation. The Zr{\^U}2 inorganic layer was deposited on PEN substrate using TEMAZ (Tetrakis(ethylmethylamino) zirconium) precursor. The organic layer was grown with n-hexane precursor. The moisture-barrier property and flexibility were measured by Ca test and bending test.",
keywords = "Atomic layer deposition, Encapsulation, Plasma enhanced CVD",
author = "Lim, \{Se Hee\} and Seo, \{Seung Woo\} and Jiyeon Shin and Cho, \{Sung Min\}",
note = "Publisher Copyright: {\textcopyright} 2014 . Society for Information Display. All rights reserved.; 21st International Display Workshops 2014, IDW 2014 ; Conference date: 03-12-2014 Through 05-12-2014",
year = "2014",
language = "English",
series = "21st International Display Workshops 2014, IDW 2014",
publisher = "Society for Information Display",
pages = "1506--1507",
booktitle = "21st International Display Workshops 2014, IDW 2014",
}