Fabrication of nanosized molecular array device and logic gate using dimethyl-phenylethynyl thiol

We fabricated an array of molecular devices with a simple vertical metal-molecule-metal (MMM) junction. The nano via holes are formed in SiNx or SiO ₂ layer by RIE to contain the molecules inside. Finally, the top Ti/Au contact has been deposited by e-beam evaporation with cooling stage. By using self-assembly process, the organic molecules dissolved in dry and oxygen-free THF are inserted to the nanopore array device for 24 hours. We used the newly synthesized compound 4-[4-(3,5-Dimethyl-phenylethynyl)-3-nitro- phenylethynyl]-benzenethiol (DM), which is designed for adding two methyl groups at 3,5 position of phenylethynyl group of Tour's compound (4-(2-Nitro-4- phenylethynyl-phenylethyyl)-benzenethiol). The molecular devices produced the diode-like I-V characteristics and were implemented to logic gate with 3×3 array devices containing the DN molecule.