Fabrication of nanoscale tubular structures and capsules of oxides by Atomic Layer Deposition (ALD)

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Uniform-sized metal oxide nanocapsules, termed nanoampoules, have been fabricated Hollow nanopipes of titania (TiO2) were first fabricated onto either a polymeric template or porous anodized aluminum oxides with monodisperse cylindrical holes by using atomic layer deposition (ALD) techniques The inner volume of individual nanopipes can be tailored precisely by controlling the thickness of layers deposited with ALD. This encapsulation strategy should have potential for application in ideal drug delivery systems, gene therapy, cosmetics, inks, chemical sensors or pigments.

Original languageEnglish
Title of host publicationECS Transactions - 3rd Symposium on Atomic Layer Deposition Applications
PublisherElectrochemical Society Inc.
Pages149-154
Number of pages6
Edition7
ISBN (Electronic)9781566775731
ISBN (Print)9781566775731
DOIs
StatePublished - 2007
Externally publishedYes
Event3rd Symposium on Atomic Layer Deposition Applications - 212th ECS Meeting - Washington, DC, United States
Duration: 8 Oct 20079 Oct 2007

Publication series

NameECS Transactions
Number7
Volume11
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference3rd Symposium on Atomic Layer Deposition Applications - 212th ECS Meeting
Country/TerritoryUnited States
CityWashington, DC
Period8/10/079/10/07

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