Fabrication and sensing behavior of piezoelectric microcantilever for nanobalance

Sanghun Shin; Sangguen Song; Youngsik Lee; Naeung Lee; Joonshik Park; Hyoderk Park; Jaichan Lee

doi:10.1143/jjap.42.6139

Fabrication and sensing behavior of piezoelectric microcantilever for nanobalance

Sanghun Shin
, Sangguen Song
, Youngsik Lee
, Naeung Lee
, Joonshik Park
, Hyoderk Park
, Jaichan Lee

Department of Advanced Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

The fabrication and analysis of a cantilever microtransducer were performed for a mass-detecting device. We designed piezoelectric microcantilever arrays with various lengths and shapes to investigate their resonance properties and sensitivity. Finite element method (FEM) simulation was carried out to estimate the resonant property of the microcantilever. A multilayered piezoelectric microcantilever has been successfully fabricated using micro-electromechanical systems (MEMS) processing. The microcantilever employs a sol-gel derived Pb(Zr_0.52Ti_0.48)O₃ (PZT) capacitor fabricated on a low-stress SiN_x layer. The microcantilever showed a natural resonant frequency of 16-26 kHz. The microcantilever exhibited a mass sensitivity of 34.1 Hz/ng, which enables its application to nanobalance, i.e., to detect biomolecules or gas molecules in a nanogram regime.

Original language	English
Pages (from-to)	6139-6142
Number of pages	4
Journal	Japanese Journal of Applied Physics
Volume	42
Issue number	9 B
DOIs	https://doi.org/10.1143/jjap.42.6139
State	Published - Sep 2003

Keywords

MEMS
Microcantilever
PZT
Resonant frequency

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10.1143/jjap.42.6139

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title = "Fabrication and sensing behavior of piezoelectric microcantilever for nanobalance",

abstract = "The fabrication and analysis of a cantilever microtransducer were performed for a mass-detecting device. We designed piezoelectric microcantilever arrays with various lengths and shapes to investigate their resonance properties and sensitivity. Finite element method (FEM) simulation was carried out to estimate the resonant property of the microcantilever. A multilayered piezoelectric microcantilever has been successfully fabricated using micro-electromechanical systems (MEMS) processing. The microcantilever employs a sol-gel derived Pb(Zr0.52Ti0.48)O3 (PZT) capacitor fabricated on a low-stress SiNx layer. The microcantilever showed a natural resonant frequency of 16-26 kHz. The microcantilever exhibited a mass sensitivity of 34.1 Hz/ng, which enables its application to nanobalance, i.e., to detect biomolecules or gas molecules in a nanogram regime.",

keywords = "MEMS, Microcantilever, PZT, Resonant frequency",

author = "Sanghun Shin and Sangguen Song and Youngsik Lee and Naeung Lee and Joonshik Park and Hyoderk Park and Jaichan Lee",

year = "2003",

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T1 - Fabrication and sensing behavior of piezoelectric microcantilever for nanobalance

AU - Shin, Sanghun

AU - Song, Sangguen

AU - Lee, Youngsik

AU - Lee, Naeung

AU - Park, Joonshik

AU - Park, Hyoderk

AU - Lee, Jaichan

PY - 2003/9

Y1 - 2003/9

N2 - The fabrication and analysis of a cantilever microtransducer were performed for a mass-detecting device. We designed piezoelectric microcantilever arrays with various lengths and shapes to investigate their resonance properties and sensitivity. Finite element method (FEM) simulation was carried out to estimate the resonant property of the microcantilever. A multilayered piezoelectric microcantilever has been successfully fabricated using micro-electromechanical systems (MEMS) processing. The microcantilever employs a sol-gel derived Pb(Zr0.52Ti0.48)O3 (PZT) capacitor fabricated on a low-stress SiNx layer. The microcantilever showed a natural resonant frequency of 16-26 kHz. The microcantilever exhibited a mass sensitivity of 34.1 Hz/ng, which enables its application to nanobalance, i.e., to detect biomolecules or gas molecules in a nanogram regime.

AB - The fabrication and analysis of a cantilever microtransducer were performed for a mass-detecting device. We designed piezoelectric microcantilever arrays with various lengths and shapes to investigate their resonance properties and sensitivity. Finite element method (FEM) simulation was carried out to estimate the resonant property of the microcantilever. A multilayered piezoelectric microcantilever has been successfully fabricated using micro-electromechanical systems (MEMS) processing. The microcantilever employs a sol-gel derived Pb(Zr0.52Ti0.48)O3 (PZT) capacitor fabricated on a low-stress SiNx layer. The microcantilever showed a natural resonant frequency of 16-26 kHz. The microcantilever exhibited a mass sensitivity of 34.1 Hz/ng, which enables its application to nanobalance, i.e., to detect biomolecules or gas molecules in a nanogram regime.

KW - MEMS

KW - Microcantilever

KW - PZT

KW - Resonant frequency

UR - https://www.scopus.com/pages/publications/0344741449

U2 - 10.1143/jjap.42.6139

DO - 10.1143/jjap.42.6139

M3 - Article

AN - SCOPUS:0344741449

SN - 0021-4922

VL - 42

SP - 6139

EP - 6142

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 9 B

ER -

Fabrication and sensing behavior of piezoelectric microcantilever for nanobalance

Abstract

Keywords

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