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Etching of magnetic tunnel junction materials using reactive ion beam

  • Min Hwan Jeon
  • , Kyung Chae Yang
  • , Jin Woo Park
  • , Deok Hyun Yun
  • , Kyong Nam Kim
  • , Geun Young Yeom
  • Sungkyunkwan University
  • Daejeon University

Research output: Contribution to journal › Article › peer-review

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