Etching characteristics of SrBi2Ta2O9 film with Ar/CHF3 plasma

  • Jung Woo Seo
  • , Do Haing Lee
  • , Won Jae Lee
  • , Byoung Gon Yu
  • , Kwang Ho Kwon
  • , Geun Young Yeom
  • , Eui Goo Chang
  • , Chang Il Kim

Research output: Contribution to journal › Conference article › peer-review

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