Etch damage of Ge2Sb2Te5 for different halogen gases
- Se Koo Kang
- , Min Hwan Jeon
- , Jong Yoon Park
- , Myung S. Jhon
- , Geun Young Yeom
- Sungkyunkwan University
- Carnegie Mellon University
Research output: Contribution to journal › Article › peer-review
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