Etch characteristics of SrBi2Ta2O9 (SBT) thin films using magnetized inductively coupled plasmas
- Young Joon Lee
- , Chang Hyun Jeong
- , Jeong Woon Bae
- , In Kyu You
- , Jong Wan Park
- , Geun Young Yeom
- Sungkyunkwan University
- Electronics and Telecommunications Research Institute
- Hanyang University
Research output: Contribution to journal › Article › peer-review
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