Abstract
Challenges of electrostatic discharge (ESD) protection in deeply scaled silicon technologies are addressed by improving design, characterization, and modeling of I/O MOSFETs, interconnect, ESD protection and power clamp devices. Recent progress on ESD protection design for both high-speed digital I/O and radiofrequency (RF) circuits are presented. Topological trade-offs are compared. High speed circuit protection techniques such as the T-coil based ESD design are reviewed in detail. Package- and wafer-level charged device model (CDM) correlation issues are discussed. I/O, ESD devices, and metal interconnect effects are examined using very fast transmission line pulses (VF-TLP) and TLP.
| Original language | English |
|---|---|
| Article number | 5582163 |
| Pages (from-to) | 2301-2311 |
| Number of pages | 11 |
| Journal | IEEE Transactions on Circuits and Systems I: Regular Papers |
| Volume | 57 |
| Issue number | 9 |
| DOIs | |
| State | Published - 2010 |
Keywords
- Charged device model (CDM)
- co-design methodology
- electrostatic discharge (ESD)
- field effect diode
- high-speed I/O
- integrated circuit reliability
- RF
- semiconductor diodes
- T-coil
- very fast transmission line pulses (VF-TLP)