Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y)

Changmin Kim; Sungwon Choi; Jeongan Choi; Hyunho Seok; Keun Oh Park; Youngho Cho; Kihong Park; Sanghyuck Jeon; Hyeong U. Kim; Taesung Kim

doi:10.1007/s12206-023-0348-2

Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y)

Changmin Kim, Sungwon Choi, Jeongan Choi, Hyunho Seok, Keun Oh Park, Youngho Cho, Kihong Park, Sanghyuck Jeon, Hyeong U. Kim, Taesung Kim

Department of Mechanical Engineering

Research output: Contribution to journal › Comment/debate

Original language	English
Pages (from-to)	2131
Number of pages	1
Journal	Journal of Mechanical Science and Technology
Volume	37
Issue number	4
DOIs	https://doi.org/10.1007/s12206-023-0348-2
State	Published - Apr 2023

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10.1007/s12206-023-0348-2

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Kim, C., Choi, S., Choi, J., Seok, H., Park, K. O., Cho, Y., Park, K., Jeon, S., Kim, H. U., & Kim, T. (2023). Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y). Journal of Mechanical Science and Technology, 37(4), 2131. https://doi.org/10.1007/s12206-023-0348-2

Kim, Changmin ; Choi, Sungwon ; Choi, Jeongan et al. / Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y). In: Journal of Mechanical Science and Technology. 2023 ; Vol. 37, No. 4. pp. 2131.

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title = "Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y)",

author = "Changmin Kim and Sungwon Choi and Jeongan Choi and Hyunho Seok and Park, \{Keun Oh\} and Youngho Cho and Kihong Park and Sanghyuck Jeon and Kim, \{Hyeong U.\} and Taesung Kim",

year = "2023",

month = apr,

doi = "10.1007/s12206-023-0348-2",

language = "English",

volume = "37",

pages = "2131",

journal = "Journal of Mechanical Science and Technology",

issn = "1738-494X",

publisher = "Korean Society of Mechanical Engineers",

number = "4",

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Kim, C, Choi, S, Choi, J, Seok, H, Park, KO, Cho, Y, Park, K, Jeon, S, Kim, HU & Kim, T 2023, 'Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y)', Journal of Mechanical Science and Technology, vol. 37, no. 4, pp. 2131. https://doi.org/10.1007/s12206-023-0348-2

Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y). / Kim, Changmin; Choi, Sungwon; Choi, Jeongan et al.
In: Journal of Mechanical Science and Technology, Vol. 37, No. 4, 04.2023, p. 2131.

Research output: Contribution to journal › Comment/debate

TY - JOUR

T1 - Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y)

AU - Kim, Changmin

AU - Choi, Sungwon

AU - Choi, Jeongan

AU - Seok, Hyunho

AU - Park, Keun Oh

AU - Cho, Youngho

AU - Park, Kihong

AU - Jeon, Sanghyuck

AU - Kim, Hyeong U.

AU - Kim, Taesung

PY - 2023/4

Y1 - 2023/4

UR - https://www.scopus.com/pages/publications/85151542023

U2 - 10.1007/s12206-023-0348-2

DO - 10.1007/s12206-023-0348-2

M3 - Comment/debate

AN - SCOPUS:85151542023

SN - 1738-494X

VL - 37

SP - 2131

JO - Journal of Mechanical Science and Technology

JF - Journal of Mechanical Science and Technology

IS - 4

ER -

Kim C, Choi S, Choi J, Seok H, Park KO, Cho Y et al. Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y). Journal of Mechanical Science and Technology. 2023 Apr;37(4):2131. doi: 10.1007/s12206-023-0348-2

Erratum to “Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process” (Journal of Mechanical Science and Technology, (2023), 37, 3, (1317-1324), 10.1007/s12206-023-0218-y)

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