Enhanced moisture-barrier property and flexibility of zirconium oxide/polymer hybrid structures

Se Hee Lim; Seung Woo Seo; Eun Jung; Heeyeop Chae; Sung Min Cho

doi:10.1007/s11814-015-0225-5

Enhanced moisture-barrier property and flexibility of zirconium oxide/polymer hybrid structures

Se Hee Lim
, Seung Woo Seo
, Eun Jung
, Heeyeop Chae
, Sung Min Cho

Department of Chemical Engineering

Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

New zirconium oxide (ZrO₂)-based organic-inorganic multilayers were fabricated and tested for flexible moisture barriers and compared with typical aluminum oxide (Al₂O₃)-based multilayers. We report that amorphous ZrO₂ had a better intrinsic barrier property than that of amorphous Al₂O₃. Due to the lower elastic modulus of ZrO₂, the ZrO₂-based structures had better flexibility than that of the Al₂O₃-based structures. The ZrO₂-based barrier was superior to the Al₂O₃-based barrier not only for flexibility but also for barrier performance. The barrier property and flexibility of the ZrO₂-based structures were enhanced by about 20% and 30% over those of the Al₂O₃-based structures, respectively.

Original language	English
Pages (from-to)	1070-1074
Number of pages	5
Journal	Korean Journal of Chemical Engineering
Volume	33
Issue number	3
DOIs	https://doi.org/10.1007/s11814-015-0225-5
State	Published - 1 Mar 2016

Keywords

Aluminum Oxide
Atomic Layer Deposition
Moisture Barrier
Zirconium Oxide

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10.1007/s11814-015-0225-5

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title = "Enhanced moisture-barrier property and flexibility of zirconium oxide/polymer hybrid structures",

abstract = "New zirconium oxide (ZrO2)-based organic-inorganic multilayers were fabricated and tested for flexible moisture barriers and compared with typical aluminum oxide (Al2O3)-based multilayers. We report that amorphous ZrO2 had a better intrinsic barrier property than that of amorphous Al2O3. Due to the lower elastic modulus of ZrO2, the ZrO2-based structures had better flexibility than that of the Al2O3-based structures. The ZrO2-based barrier was superior to the Al2O3-based barrier not only for flexibility but also for barrier performance. The barrier property and flexibility of the ZrO2-based structures were enhanced by about 20\% and 30\% over those of the Al2O3-based structures, respectively.",

keywords = "Aluminum Oxide, Atomic Layer Deposition, Moisture Barrier, Zirconium Oxide",

author = "Lim, \{Se Hee\} and Seo, \{Seung Woo\} and Eun Jung and Heeyeop Chae and Cho, \{Sung Min\}",

note = "Publisher Copyright: {\textcopyright} 2016, Korean Institute of Chemical Engineers, Seoul, Korea.",

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doi = "10.1007/s11814-015-0225-5",

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TY - JOUR

T1 - Enhanced moisture-barrier property and flexibility of zirconium oxide/polymer hybrid structures

AU - Lim, Se Hee

AU - Seo, Seung Woo

AU - Jung, Eun

AU - Chae, Heeyeop

AU - Cho, Sung Min

PY - 2016/3/1

Y1 - 2016/3/1

N2 - New zirconium oxide (ZrO2)-based organic-inorganic multilayers were fabricated and tested for flexible moisture barriers and compared with typical aluminum oxide (Al2O3)-based multilayers. We report that amorphous ZrO2 had a better intrinsic barrier property than that of amorphous Al2O3. Due to the lower elastic modulus of ZrO2, the ZrO2-based structures had better flexibility than that of the Al2O3-based structures. The ZrO2-based barrier was superior to the Al2O3-based barrier not only for flexibility but also for barrier performance. The barrier property and flexibility of the ZrO2-based structures were enhanced by about 20% and 30% over those of the Al2O3-based structures, respectively.

AB - New zirconium oxide (ZrO2)-based organic-inorganic multilayers were fabricated and tested for flexible moisture barriers and compared with typical aluminum oxide (Al2O3)-based multilayers. We report that amorphous ZrO2 had a better intrinsic barrier property than that of amorphous Al2O3. Due to the lower elastic modulus of ZrO2, the ZrO2-based structures had better flexibility than that of the Al2O3-based structures. The ZrO2-based barrier was superior to the Al2O3-based barrier not only for flexibility but also for barrier performance. The barrier property and flexibility of the ZrO2-based structures were enhanced by about 20% and 30% over those of the Al2O3-based structures, respectively.

KW - Aluminum Oxide

KW - Atomic Layer Deposition

KW - Moisture Barrier

KW - Zirconium Oxide

UR - https://www.scopus.com/pages/publications/84954541506

U2 - 10.1007/s11814-015-0225-5

DO - 10.1007/s11814-015-0225-5

M3 - Article

AN - SCOPUS:84954541506

SN - 0256-1115

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EP - 1074

JO - Korean Journal of Chemical Engineering

JF - Korean Journal of Chemical Engineering

IS - 3

ER -

Enhanced moisture-barrier property and flexibility of zirconium oxide/polymer hybrid structures

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Keywords

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