Electronic and geometric structure of one dimensional wires: An STM Study

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Abstract

Many device scientists believe that current Ultra Large Scale Integration (ULSI) technology will face technical and economic difficulties in further miniaturization. It has been predicted that 1-dimensional (1-D) transistors with connecting wires in three-dimensionally stacked structures may replace current field effect transistors in planar integration structures. We propose a new scheme to fabricate and integrate 1-D active devices. As a first step, we show the way to form 1-D wires with spatially variable electronic structures and the way to characterize them.

Original languageEnglish
Title of host publicationPHYSICS OF SEMICONDUCTORS
Subtitle of host publication27th International Conference on the Physics of Semiconductors, ICPS-27
Pages902-904
Number of pages3
DOIs
StatePublished - 30 Jun 2005
Externally publishedYes
EventPHYSICS OF SEMICONDUCTORS: 27th International Conference on the Physics of Semiconductors, ICPS-27 - Flagstaff, AZ, United States
Duration: 26 Jul 200430 Jul 2004

Publication series

NameAIP Conference Proceedings
Volume772
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

ConferencePHYSICS OF SEMICONDUCTORS: 27th International Conference on the Physics of Semiconductors, ICPS-27
Country/TerritoryUnited States
CityFlagstaff, AZ
Period26/07/0430/07/04

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