Electro-fluid-structural interaction simulation of a valveless micropump

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Abstract

In this paper, the pumping performance of a piezoelectric micropump is simulated with the commercial finite element analysis software COMSOL Multiphysics 3.2a. The micropump, which was developed in our previous work, is composed of a four-layer lightweight piezocomposite actuator, a polydimethylsiloxane (PDMS) pump chamber, and two difrusers. The piezoelectric domain, the structural domain and the fluid domain are coupled in the simulation. The water flow rates are numerically predicted for geometric parameters of the micropump. This study confirms that the micropump is optimally designed to obtain its maximum pumping performance.

Original languageEnglish
Title of host publicationNanosensors, Microsensors, and Biosensors and Systems 2007
DOIs
StatePublished - 2007
Externally publishedYes
EventNanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States
Duration: 21 Mar 200722 Mar 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6528
ISSN (Print)0277-786X

Conference

ConferenceNanosensors, Microsensors, and Biosensors and Systems 2007
Country/TerritoryUnited States
CitySan Diego, CA
Period21/03/0722/03/07

Keywords

  • Finite element analysis simulation
  • Lightweight piezocomposite curved actuator (LIPCA)
  • Micropump

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