Electrical characteristics of the backgated bottom-up silicon nanowire FETs

Duksoo Kim, Youngchai Jung, Miyoung Park, Byungsung Kim, Suheon Hong, Minsu Choi, Myunggil Kang, Yunseop Yu, Dongmok Whang, Sungwoo Hwang

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We report the electrical characteristics of backgated silicon nanowire (SiNW) FETs at temperatures ranging from 300 to 160 K. The voltage drop along the intrinsic part of the silicon nanowire (SiNW) was obtained by modeling the source/drain contacts as Schottky diodes. The field effect mobility values obtained from the extracted intrinsic voltage drop showed activation behaviors in the given temperature range. The activation energy was smaller than that of previously reported Ge nanowires.

Original languageEnglish
Article number4627459
Pages (from-to)683-687
Number of pages5
JournalIEEE Transactions on Nanotechnology
Volume7
Issue number6
DOIs
StatePublished - Nov 2008

Keywords

  • Back gate
  • Contact resistance
  • Mobility extraction
  • Silicon nanowire (SiNW) FET

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