Electrical and structural properties of a Co-sputtered SiO 2-Pt composite thin film for an embedded resistor

Seung Kyu Lim; Seong Hun Na; Eun Mi Park; Jin Soo Kim; Su Jeong Suh

doi:10.3938/jkps.61.1056

Electrical and structural properties of a Co-sputtered SiO ₂-Pt composite thin film for an embedded resistor

Seung Kyu Lim
, Seong Hun Na
, Eun Mi Park
, Jin Soo Kim
, Su Jeong Suh

Department of Advanced Materials Science and Engineering

Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

In this study, SiO ₂-Pt nano-composite ceramic metal (cermet) was developed to control the resistivity and the temperature coefficient of resistance (TCR). The experiments were conducted under various Ar pressures to find the optimum conditions for high resistivity and low TCR. Pt particles were uniformly dispersed in the SiO ₂ matrix, and the number of Pt particles changed with the Ar pressure. A stable resistivity value of 880 ~ 193820 μΩ-cm was obtained at 3 ~ 20 mtorr, and the temperature coefficient of resistance was in the range of 383. 189 ~ -3229. 14 ppm/K.

Original language	English
Pages (from-to)	1056-1059
Number of pages	4
Journal	Journal of the Korean Physical Society
Volume	61
Issue number	7
DOIs	https://doi.org/10.3938/jkps.61.1056
State	Published - 2012

Keywords

Cermet
Embedded passive materials
Embedded resistor
SiO -Pt

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10.3938/jkps.61.1056

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title = "Electrical and structural properties of a Co-sputtered SiO 2-Pt composite thin film for an embedded resistor",

abstract = "In this study, SiO 2-Pt nano-composite ceramic metal (cermet) was developed to control the resistivity and the temperature coefficient of resistance (TCR). The experiments were conducted under various Ar pressures to find the optimum conditions for high resistivity and low TCR. Pt particles were uniformly dispersed in the SiO 2 matrix, and the number of Pt particles changed with the Ar pressure. A stable resistivity value of 880 \textasciitilde{} 193820 μΩ-cm was obtained at 3 \textasciitilde{} 20 mtorr, and the temperature coefficient of resistance was in the range of 383. 189 \textasciitilde{} -3229. 14 ppm/K.",

keywords = "Cermet, Embedded passive materials, Embedded resistor, SiO -Pt",

author = "Lim, \{Seung Kyu\} and Na, \{Seong Hun\} and Park, \{Eun Mi\} and Kim, \{Jin Soo\} and Suh, \{Su Jeong\}",

year = "2012",

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language = "English",

volume = "61",

pages = "1056--1059",

journal = "Journal of the Korean Physical Society",

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T1 - Electrical and structural properties of a Co-sputtered SiO 2-Pt composite thin film for an embedded resistor

AU - Lim, Seung Kyu

AU - Na, Seong Hun

AU - Park, Eun Mi

AU - Kim, Jin Soo

AU - Suh, Su Jeong

PY - 2012

Y1 - 2012

N2 - In this study, SiO 2-Pt nano-composite ceramic metal (cermet) was developed to control the resistivity and the temperature coefficient of resistance (TCR). The experiments were conducted under various Ar pressures to find the optimum conditions for high resistivity and low TCR. Pt particles were uniformly dispersed in the SiO 2 matrix, and the number of Pt particles changed with the Ar pressure. A stable resistivity value of 880 ~ 193820 μΩ-cm was obtained at 3 ~ 20 mtorr, and the temperature coefficient of resistance was in the range of 383. 189 ~ -3229. 14 ppm/K.

AB - In this study, SiO 2-Pt nano-composite ceramic metal (cermet) was developed to control the resistivity and the temperature coefficient of resistance (TCR). The experiments were conducted under various Ar pressures to find the optimum conditions for high resistivity and low TCR. Pt particles were uniformly dispersed in the SiO 2 matrix, and the number of Pt particles changed with the Ar pressure. A stable resistivity value of 880 ~ 193820 μΩ-cm was obtained at 3 ~ 20 mtorr, and the temperature coefficient of resistance was in the range of 383. 189 ~ -3229. 14 ppm/K.

KW - Cermet

KW - Embedded passive materials

KW - Embedded resistor

KW - SiO -Pt

UR - https://www.scopus.com/pages/publications/84867470793

U2 - 10.3938/jkps.61.1056

DO - 10.3938/jkps.61.1056

M3 - Article

AN - SCOPUS:84867470793

SN - 0374-4884

VL - 61

SP - 1056

EP - 1059

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

IS - 7

ER -

Electrical and structural properties of a Co-sputtered SiO ₂-Pt composite thin film for an embedded resistor

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Keywords

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