Effects of deposition plasma power on properties of low dielectric-constant plasma polymer films deposited using hexamethyldisiloxane and 3,3-dimethyl-1-butene precursors
- Sungwoo Lee
- , Jihyung Woo
- , Eunkyoung Nam
- , Donggeun Jung
- , Jaeyoung Yang
- , Heeyeop Chae
- , Hyoungsub Kim
- Sungkyunkwan University
- Dongbu HiTek co., Ltd.
Research output: Contribution to journal › Article › peer-review
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