Effects of annealing temperature on the electrical properties of ALD-grown Hf-silicate films having various Si contents
- Dongwon Lee
- , Dongchan Suh
- , Dae Hong Ko
- , Kyung Park
- , Myung Soo Lee
- , Hyoungsub Kim
- Yonsei University
- Sungkyunkwan University
Research output: Contribution to journal › Article › peer-review
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