TY - JOUR
T1 - Effect of Viscosity on Ceria Abrasive Removal during the Buff Clean Process
AU - Kim, Juhwan
AU - Hong, Seokjun
AU - Kim, Eungchul
AU - Lee, Jaewon
AU - Kwak, Donggeon
AU - Wada, Yutaka
AU - Hiyama, Hirokuni
AU - Hamada, Satomi
AU - Kim, Taesung
N1 - Publisher Copyright:
© 2020 The Electrochemical Society ("ECS"). Published on behalf of ECS by IOP Publishing Limited.
PY - 2020/1/9
Y1 - 2020/1/9
N2 - In this study, the effect of viscosity on ceria abrasive removal during the buff clean process was investigated. First, a numerical simulation was performed to observe the shear stress on the wafer. The shear stress increased as the viscosity increased. These results imply that the viscosity increases the drag force acting on the abrasives, which can improve abrasive removal. Based on the results of the numerical simulation, the ceria abrasive removal was measured using inductively coupled plasma mass spectroscopy (ICP-MS). The ICP-MS results showed that the increased viscosity improved the cleaning efficiency of the ceria abrasive removal by 70%. In addition, a lowering of the water temperature also resulted in an increase in abrasive removal as the viscosity increased. These results can be used to improve ceria abrasive removal during the buff clean process.
AB - In this study, the effect of viscosity on ceria abrasive removal during the buff clean process was investigated. First, a numerical simulation was performed to observe the shear stress on the wafer. The shear stress increased as the viscosity increased. These results imply that the viscosity increases the drag force acting on the abrasives, which can improve abrasive removal. Based on the results of the numerical simulation, the ceria abrasive removal was measured using inductively coupled plasma mass spectroscopy (ICP-MS). The ICP-MS results showed that the increased viscosity improved the cleaning efficiency of the ceria abrasive removal by 70%. In addition, a lowering of the water temperature also resulted in an increase in abrasive removal as the viscosity increased. These results can be used to improve ceria abrasive removal during the buff clean process.
UR - https://www.scopus.com/pages/publications/85092469434
U2 - 10.1149/2162-8777/abb8bc
DO - 10.1149/2162-8777/abb8bc
M3 - Article
AN - SCOPUS:85092469434
SN - 2162-8769
VL - 9
JO - ECS Journal of Solid State Science and Technology
JF - ECS Journal of Solid State Science and Technology
IS - 8
M1 - 084003
ER -