Abstract
The effect of surface roughness on plasma oxidation behavior of aluminum layer and on tunneling magnetoresistance (TMR) was discussed. The TMR and a junction resistance were evaluated using a four point probe method. It was found that the Hc in Co layer varied with Cr thickness and it gradually enhanced up to around 100 Å.
| Original language | English |
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| Pages (from-to) | ES01 |
| Journal | Digests of the Intermag Conference |
| State | Published - 2003 |
| Event | Intermag 2003: International Magnetics Conference - Boston, MA, United States Duration: 28 Mar 2003 → 3 Apr 2003 |