Effect of surface roughness on plasma oxidation behavior of Al layer and tunneling magnetoresistance

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Abstract

The effect of surface roughness on plasma oxidation behavior of aluminum layer and on tunneling magnetoresistance (TMR) was discussed. The TMR and a junction resistance were evaluated using a four point probe method. It was found that the Hc in Co layer varied with Cr thickness and it gradually enhanced up to around 100 Å.

Original languageEnglish
Pages (from-to)ES01
JournalDigests of the Intermag Conference
StatePublished - 2003
EventIntermag 2003: International Magnetics Conference - Boston, MA, United States
Duration: 28 Mar 20033 Apr 2003

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