Effect of Si-incorporation on wear-corrosion properties of diamond-like carbon films

Ho Gun Kim; Seung Ho Ahn; Jung Gu Kim; Se Jun Park; Kwang Ryeol Lee

doi:10.1016/j.tsf.2004.11.164

Effect of Si-incorporation on wear-corrosion properties of diamond-like carbon films

Ho Gun Kim, Seung Ho Ahn, Jung Gu Kim, Se Jun Park, Kwang Ryeol Lee

Department of Advanced Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

53 Scopus citations

Abstract

Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.% contents were deposited on STS 316L substrates for orthopedic implants by means of rf plasma-assisted chemical vapor deposition (rf PACVD) technique, using mixtures of benzene (C₆H₆) and silane (SiH₄) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on wear-corrosion properties in the simulated body fluid environment through the tribological and electrochemical test. It was found that wear and corrosion to resistance of Si-DLC coatings with increasing Si content were improved owing to high sp ³ bonding.

Original language	English
Pages (from-to)	299-304
Number of pages	6
Journal	Thin Solid Films
Volume	482
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2004.11.164
State	Published - 22 Jun 2005

Keywords

Corrosion
Diamond-like carbon
Wear

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10.1016/j.tsf.2004.11.164

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title = "Effect of Si-incorporation on wear-corrosion properties of diamond-like carbon films",

abstract = "Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.\% contents were deposited on STS 316L substrates for orthopedic implants by means of rf plasma-assisted chemical vapor deposition (rf PACVD) technique, using mixtures of benzene (C6H6) and silane (SiH4) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on wear-corrosion properties in the simulated body fluid environment through the tribological and electrochemical test. It was found that wear and corrosion to resistance of Si-DLC coatings with increasing Si content were improved owing to high sp 3 bonding.",

keywords = "Corrosion, Diamond-like carbon, Wear",

author = "Kim, \{Ho Gun\} and Ahn, \{Seung Ho\} and Kim, \{Jung Gu\} and Park, \{Se Jun\} and Lee, \{Kwang Ryeol\}",

year = "2005",

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doi = "10.1016/j.tsf.2004.11.164",

language = "English",

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journal = "Thin Solid Films",

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T1 - Effect of Si-incorporation on wear-corrosion properties of diamond-like carbon films

AU - Kim, Ho Gun

AU - Ahn, Seung Ho

AU - Kim, Jung Gu

AU - Park, Se Jun

AU - Lee, Kwang Ryeol

PY - 2005/6/22

Y1 - 2005/6/22

N2 - Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.% contents were deposited on STS 316L substrates for orthopedic implants by means of rf plasma-assisted chemical vapor deposition (rf PACVD) technique, using mixtures of benzene (C6H6) and silane (SiH4) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on wear-corrosion properties in the simulated body fluid environment through the tribological and electrochemical test. It was found that wear and corrosion to resistance of Si-DLC coatings with increasing Si content were improved owing to high sp 3 bonding.

AB - Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.% contents were deposited on STS 316L substrates for orthopedic implants by means of rf plasma-assisted chemical vapor deposition (rf PACVD) technique, using mixtures of benzene (C6H6) and silane (SiH4) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on wear-corrosion properties in the simulated body fluid environment through the tribological and electrochemical test. It was found that wear and corrosion to resistance of Si-DLC coatings with increasing Si content were improved owing to high sp 3 bonding.

KW - Corrosion

KW - Diamond-like carbon

KW - Wear

UR - https://www.scopus.com/pages/publications/17644372716

U2 - 10.1016/j.tsf.2004.11.164

DO - 10.1016/j.tsf.2004.11.164

M3 - Article

AN - SCOPUS:17644372716

SN - 0040-6090

VL - 482

SP - 299

EP - 304

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Effect of Si-incorporation on wear-corrosion properties of diamond-like carbon films

Abstract

Keywords

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