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Effect of showerhead electrode materials on high aspect ratio etching of SiO2

  • Seong Bae Kim
  • , Hyun Woo Tak
  • , Chan Hyuk Choi
  • , Jun Soo Lee
  • , Myeong Ho Park
  • , Akihide Sato
  • , Sang Yeob Lee
  • , Dong Woo Kim
  • , Geun Young Yeom
  • Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

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