Effect of Ni-surface morphology on the growth of carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Vertically aligned carbon nanotubes were grown on Ni-coated Si substrates using microwave-plasma enhanced chemical vapor deposition. The surface morphology of Ni thin films was varied with the rf power density during the sputtering process. It was found that the growth of carbon nanotubes was strongly influenced by the surface morphology of Ni thin film. Pure carbon nanotubes were synthesized on the Ni thin film with uniformly distributed small grain sizes, whereas a lot of carbonaceous particles were produced in addition to the nanotubes, when the nanotubes were grown on the Ni film with widely distributed grain sizes. With decreasing Ni-grain size, the diameter and the wall-number of carbon nanotubes decreased while the length and the density of the nanotubes increased.

Original languageEnglish
Title of host publicationNanonetwork Materials
Subtitle of host publicationFullerenes, Nanotubes, and Related Systems
EditorsTsuneya Ando, Yoshihiro Iwasawa, Koichi Kikuchi, Yahachi Saito, Susumu Saito, Mototada Kobayashi
PublisherAmerican Institute of Physics Inc.
Pages39-41
Number of pages3
ISBN (Electronic)0735400326, 9780735400320
DOIs
StatePublished - 16 Oct 2001
Externally publishedYes
EventInternational Symposium on Nanonetwork Materials: Fullerenes, Nanotubes, and Related Systems 2001 - Kamakura, Japan
Duration: 15 Jan 200118 Jan 2001

Publication series

NameAIP Conference Proceedings
Volume590
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

ConferenceInternational Symposium on Nanonetwork Materials: Fullerenes, Nanotubes, and Related Systems 2001
Country/TerritoryJapan
CityKamakura
Period15/01/0118/01/01

Fingerprint

Dive into the research topics of 'Effect of Ni-surface morphology on the growth of carbon nanotubes by microwave plasma-enhanced chemical vapor deposition'. Together they form a unique fingerprint.

Cite this