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Effect of halogen-based neutral beam on the etching of Ge 2Sb2Te5

  • S. K. Kang
  • , M. H. Jeon
  • , J. Y. Park
  • , G. Y. Yeom
  • , M. S. Jhon
  • , B. W. Koo
  • , Y. W. Kim

Research output: Contribution to journal › Article › peer-review

13   Link opens in a new tab Scopus citations

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