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Effect of Fe-complex catalysts on passivation layer and hydroxyl radical generation during tungsten chemical mechanical planarization

  • Hyunho Kim
  • , Gyuyoung Lee
  • , Seunghwan Lee
  • , Pengzhan Liu
  • , Jongyeong Jeon
  • , Ziyang Wang
  • , Chaerin Park
  • , Jaewon Lee
  • , Hosin Hwang
  • , Chulwoo Bae
  • , Taesung Kim
  • Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

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