@inproceedings{03e1f998c3ce446b9c1d65945d09ee15,
title = "Effect of DI-Water dilution and etchant arm movement on spinning type wet etch",
keywords = "DI-water dilution, Etch amount, Etchant arm movement, Uniformity",
author = "Lee, \{Hui Hwan\} and Ahn, \{Duk Min\} and Lim, \{Seung Taek\} and Kim, \{Tae Sung\}",
year = "2015",
doi = "10.4028/www.scientific.net/SSP.219.125",
language = "English",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "125--127",
editor = "Mertens, \{Paul W.\} and Marc Meuris and Marc Heyns and Marc Meuris and Marc Heyns",
booktitle = "Ultra Clean Processing of Semiconductor Surfaces XII",
note = "12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014 ; Conference date: 21-09-2014 Through 24-09-2014",
}