Effect of C4F8Isomers on High Aspect Ratio Contact SiO2Etching and Greenhouse Gas Emission
- Chan Hyuk Choi
- , Myeong Ho Park
- , Hyun Woo Tak
- , Jun Soo Lee
- , Eun Koo Kim
- , Akihide Sato
- , Bong Sun Kim
- , Sung Taek Kim
- , Yong Il Kim
- , Dong Woo Kim
- , Geun Young Yeom
Research output: Contribution to journal › Article › peer-review