Effect of an atmospheric pressure plasma cleaning on the outgassing characteristics of MgO layer for plasma display panel

Byoung Kwan Song; Young Joon Lee; Chang Heon Yi; Hyun Ki Hwang; Geun Young Yeom

doi:10.1143/jjap.42.l74

Effect of an atmospheric pressure plasma cleaning on the outgassing characteristics of MgO layer for plasma display panel

Byoung Kwan Song
, Young Joon Lee
, Chang Heon Yi
, Hyun Ki Hwang
, Geun Young Yeom

Department of Advanced Materials Science and Engineering

Sungkyunkwan University

Research output: Contribution to journal › Letter › peer-review

6 Scopus citations

Abstract

In this study, the effects of atmospheric pressure plasma cleaning on the outgassing characteristics of MgO deposited on plasma display panel(PDP) glass have been investigated as a function of outgassing temperature. After the cleaning of the MgO deposited glass with He/O₂/Ar and He/O₂/Ar/N₂, the decrease of main outgassing species such H₂O, CO₂, CO, and H₂ and the increase of secondary electron emission from the MgO surface could be observed, possibly due to the removal of organic materials incorporated on the MgO layer. As the cleaning by He/O₂/Ar/N₂ showed, a lower outgassing vapor pressure, is possibly due to a higher cleaning rate.

Original language	English
Pages (from-to)	L74-L76
Journal	Japanese Journal of Applied Physics
Volume	42
Issue number	1 A/B
DOIs	https://doi.org/10.1143/jjap.42.l74
State	Published - 15 Jan 2003

Keywords

Atmospheric pressure plasma
Cleaning
Display
MgO
Outgassing characteristics
PDP

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1143/jjap.42.l74

Cite this

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title = "Effect of an atmospheric pressure plasma cleaning on the outgassing characteristics of MgO layer for plasma display panel",

abstract = "In this study, the effects of atmospheric pressure plasma cleaning on the outgassing characteristics of MgO deposited on plasma display panel(PDP) glass have been investigated as a function of outgassing temperature. After the cleaning of the MgO deposited glass with He/O2/Ar and He/O2/Ar/N2, the decrease of main outgassing species such H2O, CO2, CO, and H2 and the increase of secondary electron emission from the MgO surface could be observed, possibly due to the removal of organic materials incorporated on the MgO layer. As the cleaning by He/O2/Ar/N2 showed, a lower outgassing vapor pressure, is possibly due to a higher cleaning rate.",

keywords = "Atmospheric pressure plasma, Cleaning, Display, MgO, Outgassing characteristics, PDP",

author = "Song, \{Byoung Kwan\} and Lee, \{Young Joon\} and Yi, \{Chang Heon\} and Hwang, \{Hyun Ki\} and Yeom, \{Geun Young\}",

year = "2003",

month = jan,

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doi = "10.1143/jjap.42.l74",

language = "English",

volume = "42",

pages = "L74--L76",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "1 A/B",

}

TY - JOUR

T1 - Effect of an atmospheric pressure plasma cleaning on the outgassing characteristics of MgO layer for plasma display panel

AU - Song, Byoung Kwan

AU - Lee, Young Joon

AU - Yi, Chang Heon

AU - Hwang, Hyun Ki

AU - Yeom, Geun Young

PY - 2003/1/15

Y1 - 2003/1/15

N2 - In this study, the effects of atmospheric pressure plasma cleaning on the outgassing characteristics of MgO deposited on plasma display panel(PDP) glass have been investigated as a function of outgassing temperature. After the cleaning of the MgO deposited glass with He/O2/Ar and He/O2/Ar/N2, the decrease of main outgassing species such H2O, CO2, CO, and H2 and the increase of secondary electron emission from the MgO surface could be observed, possibly due to the removal of organic materials incorporated on the MgO layer. As the cleaning by He/O2/Ar/N2 showed, a lower outgassing vapor pressure, is possibly due to a higher cleaning rate.

AB - In this study, the effects of atmospheric pressure plasma cleaning on the outgassing characteristics of MgO deposited on plasma display panel(PDP) glass have been investigated as a function of outgassing temperature. After the cleaning of the MgO deposited glass with He/O2/Ar and He/O2/Ar/N2, the decrease of main outgassing species such H2O, CO2, CO, and H2 and the increase of secondary electron emission from the MgO surface could be observed, possibly due to the removal of organic materials incorporated on the MgO layer. As the cleaning by He/O2/Ar/N2 showed, a lower outgassing vapor pressure, is possibly due to a higher cleaning rate.

KW - Atmospheric pressure plasma

KW - Cleaning

KW - Display

KW - MgO

KW - Outgassing characteristics

KW - PDP

UR - https://www.scopus.com/pages/publications/0038814677

U2 - 10.1143/jjap.42.l74

DO - 10.1143/jjap.42.l74

M3 - Letter

AN - SCOPUS:0038814677

SN - 0021-4922

VL - 42

SP - L74-L76

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 1 A/B

ER -

Effect of an atmospheric pressure plasma cleaning on the outgassing characteristics of MgO layer for plasma display panel

Abstract

Keywords

UN SDGs

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