Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells

Jisoo Ko; Daeyeong Gong; Krishnakumar Pillai; Kong Soo Lee; Minkyu Ju; Pyungho Choi; Kwang Ryul Kim; Junsin Yi; Byoungdeog Choi

doi:10.1016/j.tsf.2011.04.078

Double layer SiN_x:H films for passivation and anti-reflection coating of c-Si solar cells

Jisoo Ko, Daeyeong Gong, Krishnakumar Pillai, Kong Soo Lee, Minkyu Ju, Pyungho Choi, Kwang Ryul Kim, Junsin Yi, Byoungdeog Choi

Department of Electronic and Electrical Engineering

Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

34 Scopus citations

Abstract

In this report, we present a cost effective simple innovative approach to fabricate double layer anti-reflection (DLAR) coatings using a single material which can provide high qualities of passivation and anti-reflection property. Two layers of SiN_x:H films with different refractive indices were deposited onto p-type c-Si wafer using plasma enhanced chemical vapor deposition reactor by controlling the NH₃ and SiH₄ gas ratio. Refractive indices of top and bottom layers were chosen as 1.9 and 2.3 respectively. The effect of passivation at the interface was investigated by effective carrier lifetime, hydrogen concentration and interface trapped density (D_it) measurements. The optical characteristic was analyzed by reflectance and transmittance measurements. A superior efficiency of 17.61% was obtained for solar cells fabricated with DLAR coating when compared to an efficiency of 17.24% for cells with SLAR coating. Further, J_sc and V_oc of solar cell with DLAR coating is increased by a value of ~ 1 mA/cm² and 4 mV respectively than cell with SLAR coating.

Original language	English
Pages (from-to)	6887-6891
Number of pages	5
Journal	Thin Solid Films
Volume	519
Issue number	20
DOIs	https://doi.org/10.1016/j.tsf.2011.04.078
State	Published - 1 Aug 2011

Keywords

Anti-reflection coating (ARC)
Passivation
PECVD
Silicon nitride
Solar cell

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1016/j.tsf.2011.04.078

Cite this

@article{9d7262c191f4457586c05ccbd444803c,

title = "Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells",

abstract = "In this report, we present a cost effective simple innovative approach to fabricate double layer anti-reflection (DLAR) coatings using a single material which can provide high qualities of passivation and anti-reflection property. Two layers of SiNx:H films with different refractive indices were deposited onto p-type c-Si wafer using plasma enhanced chemical vapor deposition reactor by controlling the NH3 and SiH4 gas ratio. Refractive indices of top and bottom layers were chosen as 1.9 and 2.3 respectively. The effect of passivation at the interface was investigated by effective carrier lifetime, hydrogen concentration and interface trapped density (Dit) measurements. The optical characteristic was analyzed by reflectance and transmittance measurements. A superior efficiency of 17.61\% was obtained for solar cells fabricated with DLAR coating when compared to an efficiency of 17.24\% for cells with SLAR coating. Further, Jsc and Voc of solar cell with DLAR coating is increased by a value of \textasciitilde{} 1 mA/cm2 and 4 mV respectively than cell with SLAR coating.",

keywords = "Anti-reflection coating (ARC), Passivation, PECVD, Silicon nitride, Solar cell",

author = "Jisoo Ko and Daeyeong Gong and Krishnakumar Pillai and Lee, \{Kong Soo\} and Minkyu Ju and Pyungho Choi and Kim, \{Kwang Ryul\} and Junsin Yi and Byoungdeog Choi",

year = "2011",

month = aug,

day = "1",

doi = "10.1016/j.tsf.2011.04.078",

language = "English",

volume = "519",

pages = "6887--6891",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "20",

}

TY - JOUR

T1 - Double layer SiNx:H films for passivation and anti-reflection coating of c-Si solar cells

AU - Ko, Jisoo

AU - Gong, Daeyeong

AU - Pillai, Krishnakumar

AU - Lee, Kong Soo

AU - Ju, Minkyu

AU - Choi, Pyungho

AU - Kim, Kwang Ryul

AU - Yi, Junsin

AU - Choi, Byoungdeog

PY - 2011/8/1

Y1 - 2011/8/1

N2 - In this report, we present a cost effective simple innovative approach to fabricate double layer anti-reflection (DLAR) coatings using a single material which can provide high qualities of passivation and anti-reflection property. Two layers of SiNx:H films with different refractive indices were deposited onto p-type c-Si wafer using plasma enhanced chemical vapor deposition reactor by controlling the NH3 and SiH4 gas ratio. Refractive indices of top and bottom layers were chosen as 1.9 and 2.3 respectively. The effect of passivation at the interface was investigated by effective carrier lifetime, hydrogen concentration and interface trapped density (Dit) measurements. The optical characteristic was analyzed by reflectance and transmittance measurements. A superior efficiency of 17.61% was obtained for solar cells fabricated with DLAR coating when compared to an efficiency of 17.24% for cells with SLAR coating. Further, Jsc and Voc of solar cell with DLAR coating is increased by a value of ~ 1 mA/cm2 and 4 mV respectively than cell with SLAR coating.

AB - In this report, we present a cost effective simple innovative approach to fabricate double layer anti-reflection (DLAR) coatings using a single material which can provide high qualities of passivation and anti-reflection property. Two layers of SiNx:H films with different refractive indices were deposited onto p-type c-Si wafer using plasma enhanced chemical vapor deposition reactor by controlling the NH3 and SiH4 gas ratio. Refractive indices of top and bottom layers were chosen as 1.9 and 2.3 respectively. The effect of passivation at the interface was investigated by effective carrier lifetime, hydrogen concentration and interface trapped density (Dit) measurements. The optical characteristic was analyzed by reflectance and transmittance measurements. A superior efficiency of 17.61% was obtained for solar cells fabricated with DLAR coating when compared to an efficiency of 17.24% for cells with SLAR coating. Further, Jsc and Voc of solar cell with DLAR coating is increased by a value of ~ 1 mA/cm2 and 4 mV respectively than cell with SLAR coating.

KW - Anti-reflection coating (ARC)

KW - Passivation

KW - PECVD

KW - Silicon nitride

KW - Solar cell

UR - https://www.scopus.com/pages/publications/80051548555

U2 - 10.1016/j.tsf.2011.04.078

DO - 10.1016/j.tsf.2011.04.078

M3 - Article

AN - SCOPUS:80051548555

SN - 0040-6090

VL - 519

SP - 6887

EP - 6891

JO - Thin Solid Films

JF - Thin Solid Films

IS - 20

ER -