Abstract
Patterned gold microstructures were fabricated on a polymer substrate by a novel method involving selective electroless plating and microcontact printing. The micro-sized gold patterns were made by the site-selective chemical modification of polyimide substrate films using aqueous potassium hydroxide solution and microcontact printing with a pitch size in the range of 20-200 μm. The base-treated area of the polyimide film became hydrophilic in the regions where the ion-exchange reactions took place for the subsequent metallization. The hydrophilic patterns were sensitized by placing the film in a solution of PdCl2 and, subsequently, the activated substrate was immersed in an electroless plating solution of Ni and Au to provide well-developed gold patterns on polyimide substrate films.
| Original language | English |
|---|---|
| Pages (from-to) | 136-142 |
| Number of pages | 7 |
| Journal | Microelectronic Engineering |
| Volume | 85 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 2008 |
Keywords
- Electroless plating
- Gold
- Microcontact printing
- Polyimide film