Diamond-like carbon protective anti-reflection coating for Si solar cell

Won Seok Choi; Kyunghae Kim; Junsin Yi; Byungyou Hong

doi:10.1016/j.matlet.2007.06.019

Diamond-like carbon protective anti-reflection coating for Si solar cell

Won Seok Choi
, Kyunghae Kim
, Junsin Yi
, Byungyou Hong

Department of Electronic and Electrical Engineering

Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

77 Scopus citations

Abstract

Diamond-like carbon (DLC) films were deposited on corning glass and silicon substrates by the RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method using methane (CH₄) and hydrogen (H₂) gases. We examined the effects of the CH₄ to H₂ ratio on the tribological and optical properties of the DLC films. The hardness of the DLC films was measured with a nano-indenter. The optical properties of the DLC thin film were investigated by UV/VIS spectrometry and ellipsometry. From these measurements, we obtained optimum anti-reflection coating at a methane flow rate of 20 sccm. Also, solar cells were fabricated on a silicon substrate using the optimized DLC films as an anti-reflection coating and we obtained an increase of solar cell efficiency of about 20%.

Original language	English
Pages (from-to)	577-580
Number of pages	4
Journal	Materials Letters
Volume	62
Issue number	4-5
DOIs	https://doi.org/10.1016/j.matlet.2007.06.019
State	Published - 29 Feb 2008

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10.1016/j.matlet.2007.06.019

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title = "Diamond-like carbon protective anti-reflection coating for Si solar cell",

abstract = "Diamond-like carbon (DLC) films were deposited on corning glass and silicon substrates by the RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method using methane (CH4) and hydrogen (H2) gases. We examined the effects of the CH4 to H2 ratio on the tribological and optical properties of the DLC films. The hardness of the DLC films was measured with a nano-indenter. The optical properties of the DLC thin film were investigated by UV/VIS spectrometry and ellipsometry. From these measurements, we obtained optimum anti-reflection coating at a methane flow rate of 20 sccm. Also, solar cells were fabricated on a silicon substrate using the optimized DLC films as an anti-reflection coating and we obtained an increase of solar cell efficiency of about 20\%.",

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T1 - Diamond-like carbon protective anti-reflection coating for Si solar cell

AU - Choi, Won Seok

AU - Kim, Kyunghae

AU - Yi, Junsin

AU - Hong, Byungyou

PY - 2008/2/29

Y1 - 2008/2/29

N2 - Diamond-like carbon (DLC) films were deposited on corning glass and silicon substrates by the RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method using methane (CH4) and hydrogen (H2) gases. We examined the effects of the CH4 to H2 ratio on the tribological and optical properties of the DLC films. The hardness of the DLC films was measured with a nano-indenter. The optical properties of the DLC thin film were investigated by UV/VIS spectrometry and ellipsometry. From these measurements, we obtained optimum anti-reflection coating at a methane flow rate of 20 sccm. Also, solar cells were fabricated on a silicon substrate using the optimized DLC films as an anti-reflection coating and we obtained an increase of solar cell efficiency of about 20%.

AB - Diamond-like carbon (DLC) films were deposited on corning glass and silicon substrates by the RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method using methane (CH4) and hydrogen (H2) gases. We examined the effects of the CH4 to H2 ratio on the tribological and optical properties of the DLC films. The hardness of the DLC films was measured with a nano-indenter. The optical properties of the DLC thin film were investigated by UV/VIS spectrometry and ellipsometry. From these measurements, we obtained optimum anti-reflection coating at a methane flow rate of 20 sccm. Also, solar cells were fabricated on a silicon substrate using the optimized DLC films as an anti-reflection coating and we obtained an increase of solar cell efficiency of about 20%.

UR - https://www.scopus.com/pages/publications/37249048311

U2 - 10.1016/j.matlet.2007.06.019

DO - 10.1016/j.matlet.2007.06.019

M3 - Article

AN - SCOPUS:37249048311

SN - 0167-577X

VL - 62

SP - 577

EP - 580

JO - Materials Letters

JF - Materials Letters

IS - 4-5

ER -

Diamond-like carbon protective anti-reflection coating for Si solar cell

Abstract

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