Deposition of SiO2 by plasma enhanced chemical vapor deposition as the diffusion barrier to polymer substrates
- Chang Hyun Jeong
- , June Hee Lee
- , Jong Tae Lim
- , Nam Gil Cho
- , Cheol Hee Moon
- , Geun Young Yeom
- Sungkyunkwan University
- Samsung
Research output: Contribution to journal › Article › peer-review
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