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Dependence of electrical and optical properties of amorphous SiC:H thin films grown by rf plasma enhanced chemical vapor deposition on annealing temperature

  • M. G. Park
  • , W. S. Choi
  • , B. Hong
  • , Y. T. Kim
  • , D. H. Yoon
  • Sungkyunkwan University

Research output: Contribution to journal › Article › peer-review

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