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Demonstration of monolithic co-fabrication of Y 1 Ba 2 Cu 3 O 7-δ and CMOS devices on the same sapphire substrate

  • P. R. De La Houssaye
  • , M. J. Burns
  • , W. J. Ruby
  • , S. D. Russell
  • , S. R. Clayton
  • , G. A. Garcia
  • , L. P. Lee
  • Space and Naval Warfare Systems Center
  • Conductus, Inc.

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Article number1009619
JournalDevice Research Conference - Conference Digest, DRC
VolumePart F146191
DOIs
StatePublished - 1993
Externally publishedYes
Event51st Annual Device Research Conference, DRC 1993 - Santa Barbara, United States
Duration: 21 Jun 199323 Jun 1993

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