Degradation of poly(ethylene glycol-propylene glycol) copolymer and its influences on copper electrodeposition

Seunghoe Choe; Myung Jun Kim; Hoe Chul Kim; Taeho Lim; Kyung Ju Park; Kwang Hwan Kim; Sang Hyun Ahn; Anna Lee; Soo Kil Kim; Jae Jeong Kim

doi:10.1016/j.jelechem.2013.12.023

Degradation of poly(ethylene glycol-propylene glycol) copolymer and its influences on copper electrodeposition

Seunghoe Choe
, Myung Jun Kim
, Hoe Chul Kim
, Taeho Lim
, Kyung Ju Park
, Kwang Hwan Kim
, Sang Hyun Ahn
, Anna Lee
, Soo Kil Kim
, Jae Jeong Kim

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

In this work, the degradation of poly(ethylene glycol-propylene glycol) copolymer (PEG-PPG) and its effect on the electrodeposition of Cu were investigated. PEG-PPG became fragmented during the electrodeposition with changing its terminal groups from hydroxyl to aldehyde, formic ester, and ketone. The aged solution showed a higher saturation current density than the fresh solution in chronoamperometry (CA) measurements, resulting from an easier desorption of the cleaved PEG-PPG from the copper surface through the competition with bis-(3-sulfopropyl)-disulfide (SPS). Furthermore, the electrical resistivity of Cu films deposited from the aged solution increased due to a decrease in the grain sizes.

Original language	English
Pages (from-to)	85-91
Number of pages	7
Journal	Journal of Electroanalytical Chemistry
Volume	714-715
DOIs	https://doi.org/10.1016/j.jelechem.2013.12.023
State	Published - 1 Feb 2014
Externally published	Yes

Keywords

Additive
Copper electrodeposition
Cyclic voltammetry stripping
Decomposition
Poly(ethylene glycol-propylene glycol)

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10.1016/j.jelechem.2013.12.023

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title = "Degradation of poly(ethylene glycol-propylene glycol) copolymer and its influences on copper electrodeposition",

abstract = "In this work, the degradation of poly(ethylene glycol-propylene glycol) copolymer (PEG-PPG) and its effect on the electrodeposition of Cu were investigated. PEG-PPG became fragmented during the electrodeposition with changing its terminal groups from hydroxyl to aldehyde, formic ester, and ketone. The aged solution showed a higher saturation current density than the fresh solution in chronoamperometry (CA) measurements, resulting from an easier desorption of the cleaved PEG-PPG from the copper surface through the competition with bis-(3-sulfopropyl)-disulfide (SPS). Furthermore, the electrical resistivity of Cu films deposited from the aged solution increased due to a decrease in the grain sizes.",

keywords = "Additive, Copper electrodeposition, Cyclic voltammetry stripping, Decomposition, Poly(ethylene glycol-propylene glycol)",

author = "Seunghoe Choe and Kim, \{Myung Jun\} and Kim, \{Hoe Chul\} and Taeho Lim and Park, \{Kyung Ju\} and Kim, \{Kwang Hwan\} and Ahn, \{Sang Hyun\} and Anna Lee and Kim, \{Soo Kil\} and Kim, \{Jae Jeong\}",

year = "2014",

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day = "1",

doi = "10.1016/j.jelechem.2013.12.023",

language = "English",

volume = "714-715",

pages = "85--91",

journal = "Journal of Electroanalytical Chemistry",

issn = "1572-6657",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Degradation of poly(ethylene glycol-propylene glycol) copolymer and its influences on copper electrodeposition

AU - Choe, Seunghoe

AU - Kim, Myung Jun

AU - Kim, Hoe Chul

AU - Lim, Taeho

AU - Park, Kyung Ju

AU - Kim, Kwang Hwan

AU - Ahn, Sang Hyun

AU - Lee, Anna

AU - Kim, Soo Kil

AU - Kim, Jae Jeong

PY - 2014/2/1

Y1 - 2014/2/1

N2 - In this work, the degradation of poly(ethylene glycol-propylene glycol) copolymer (PEG-PPG) and its effect on the electrodeposition of Cu were investigated. PEG-PPG became fragmented during the electrodeposition with changing its terminal groups from hydroxyl to aldehyde, formic ester, and ketone. The aged solution showed a higher saturation current density than the fresh solution in chronoamperometry (CA) measurements, resulting from an easier desorption of the cleaved PEG-PPG from the copper surface through the competition with bis-(3-sulfopropyl)-disulfide (SPS). Furthermore, the electrical resistivity of Cu films deposited from the aged solution increased due to a decrease in the grain sizes.

AB - In this work, the degradation of poly(ethylene glycol-propylene glycol) copolymer (PEG-PPG) and its effect on the electrodeposition of Cu were investigated. PEG-PPG became fragmented during the electrodeposition with changing its terminal groups from hydroxyl to aldehyde, formic ester, and ketone. The aged solution showed a higher saturation current density than the fresh solution in chronoamperometry (CA) measurements, resulting from an easier desorption of the cleaved PEG-PPG from the copper surface through the competition with bis-(3-sulfopropyl)-disulfide (SPS). Furthermore, the electrical resistivity of Cu films deposited from the aged solution increased due to a decrease in the grain sizes.

KW - Additive

KW - Copper electrodeposition

KW - Cyclic voltammetry stripping

KW - Decomposition

KW - Poly(ethylene glycol-propylene glycol)

UR - https://www.scopus.com/pages/publications/84892724945

U2 - 10.1016/j.jelechem.2013.12.023

DO - 10.1016/j.jelechem.2013.12.023

M3 - Article

AN - SCOPUS:84892724945

SN - 1572-6657

VL - 714-715

SP - 85

EP - 91

JO - Journal of Electroanalytical Chemistry

JF - Journal of Electroanalytical Chemistry

ER -

Degradation of poly(ethylene glycol-propylene glycol) copolymer and its influences on copper electrodeposition

Abstract

Keywords

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