Dechlorination and crystallization of solution-processed zinc tin oxide thin film transistor with various annealing temperature

Jeong Soo Lee, Sung Hwan Choi, Seung Hee Kuk, Moon Kyu Song, Yong Hoon Kim, Jang Yeon Kwon, Min Koo Han

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We investigated solution-processed zinc tin oxide (ZTO) thin film transistors (TFTs) with various annehaling temperature. When the annealing temperature increased from 300°C to 500°C, ZTO film was dechlorinated and nano-crystallized, and saturation mobility of solution-processed ZTO thin film transistor increased from 0.18 cm2/V·sec to 2.15 cm 2/V·sec.

Original languageEnglish
Title of host publicationSociety for Information Display - 18th International Display Workshops 2011, IDW'11
Pages1685-1688
Number of pages4
StatePublished - 2011
Externally publishedYes
Event18th International Display Workshops 2011, IDW 2011 - Nagoya, Japan
Duration: 7 Dec 20119 Dec 2011

Publication series

NameProceedings of the International Display Workshops
Volume3
ISSN (Print)1883-2490

Conference

Conference18th International Display Workshops 2011, IDW 2011
Country/TerritoryJapan
CityNagoya
Period7/12/119/12/11

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