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Dechlorination and crystallization of solution-processed zinc tin oxide thin film transistor with various annealing temperature

  • Jeong Soo Lee
  • , Sung Hwan Choi
  • , Seung Hee Kuk
  • , Moon Kyu Song
  • , Yong Hoon Kim
  • , Jang Yeon Kwon
  • , Min Koo Han
  • Seoul National University
  • Korea Electronics Technology Institute

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We investigated solution-processed zinc tin oxide (ZTO) thin film transistors (TFTs) with various annehaling temperature. When the annealing temperature increased from 300°C to 500°C, ZTO film was dechlorinated and nano-crystallized, and saturation mobility of solution-processed ZTO thin film transistor increased from 0.18 cm2/V·sec to 2.15 cm 2/V·sec.

Original languageEnglish
Title of host publicationSociety for Information Display - 18th International Display Workshops 2011, IDW'11
Pages1685-1688
Number of pages4
StatePublished - 2011
Externally publishedYes
Event18th International Display Workshops 2011, IDW 2011 - Nagoya, Japan
Duration: 7 Dec 20119 Dec 2011

Publication series

NameProceedings of the International Display Workshops
Volume3
ISSN (Print)1883-2490

Conference

Conference18th International Display Workshops 2011, IDW 2011
Country/TerritoryJapan
CityNagoya
Period7/12/119/12/11

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