Corrosion behavior of TiN, TiAlN, TiAlSiN thin films deposited on tool steel in the 3.5 wt.% NaCl solution

Yun Ha Yoo, Diem Phuong Le, Jung Gu Kim, Sun Kyu Kim, Pham Van Vinh

Research output: Contribution to journalArticlepeer-review

133 Scopus citations

Abstract

TiN, TiAlN and TiAlSiN hard coatings were deposited onto AISI H13 tool steel by cathodic arc plasma method. X-ray diffraction (XRD) analysis confirmed that incorporation of Al and Si into TiN led to refinement of microstructure. From the results of potentiodynamic polarization test and electrochemical impedance spectroscopy (EIS) test conducted in an aerated 3.5% NaCl solution, the TiAlSiN film showed the best corrosion resistance with the lowest corrosion current density and porosity, the highest protective efficiency and total resistance (pore resistance plus charge transfer resistance).

Original languageEnglish
Pages (from-to)3544-3548
Number of pages5
JournalThin Solid Films
Volume516
Issue number11
DOIs
StatePublished - 1 Apr 2008

Keywords

  • Cathodic arc plasma deposition
  • Electrochemical impedance spectroscopy
  • Potentiodynamic test
  • TiN-based superhard coating

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