Correction to: Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process (Electronic Materials Letters, (2021), 17, 3, (250-259), 10.1007/s13391-021-00280-1)

Research output: Contribution to journalComment/debate

Abstract

In the original publication of the article, the third author’s affiliation was published incorrectly. The correct affiliation is given in this correction. The original article has been corrected.

Original languageEnglish
Pages (from-to)422
Number of pages1
JournalElectronic Materials Letters
Volume18
Issue number4
DOIs
StatePublished - Jul 2022

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