Correction to: Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process (Electronic Materials Letters, (2021), 17, 3, (250-259), 10.1007/s13391-021-00280-1)

Tae Min Kim; Hyun Sik Sim; Jae Wook Jeon

doi:10.1007/s13391-021-00311-x

Correction to: Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process (Electronic Materials Letters, (2021), 17, 3, (250-259), 10.1007/s13391-021-00280-1)

Tae Min Kim
, Hyun Sik Sim
, Jae Wook Jeon

Department of Semiconductor Systems Engineering

Sungkyunkwan University
Samsung

Research output: Contribution to journal › Comment/debate

Abstract

In the original publication of the article, the third author’s affiliation was published incorrectly. The correct affiliation is given in this correction. The original article has been corrected.

Original language	English
Pages (from-to)	422
Number of pages	1
Journal	Electronic Materials Letters
Volume	18
Issue number	4
DOIs	https://doi.org/10.1007/s13391-021-00311-x
State	Published - Jul 2022

Access to Document

10.1007/s13391-021-00311-x

Cite this

@article{4bda38bfbc964458bfd141900c4f937a,

title = "Correction to: Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process (Electronic Materials Letters, (2021), 17, 3, (250-259), 10.1007/s13391-021-00280-1)",

abstract = "In the original publication of the article, the third author{\textquoteright}s affiliation was published incorrectly. The correct affiliation is given in this correction. The original article has been corrected.",

author = "Kim, \{Tae Min\} and Sim, \{Hyun Sik\} and Jeon, \{Jae Wook\}",

note = "Publisher Copyright: {\textcopyright} 2021, The Korean Institute of Metals and Materials.",

year = "2022",

month = jul,

doi = "10.1007/s13391-021-00311-x",

language = "English",

volume = "18",

pages = "422",

journal = "Electronic Materials Letters",

issn = "1738-8090",

publisher = "Springer Netherlands",

number = "4",

}

Correction to: Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process (Electronic Materials Letters, (2021), 17, 3, (250-259), 10.1007/s13391-021-00280-1). / Kim, Tae Min; Sim, Hyun Sik; Jeon, Jae Wook.
In: Electronic Materials Letters, Vol. 18, No. 4, 07.2022, p. 422.

Research output: Contribution to journal › Comment/debate

TY - JOUR

T1 - Correction to

T2 - Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process (Electronic Materials Letters, (2021), 17, 3, (250-259), 10.1007/s13391-021-00280-1)

AU - Kim, Tae Min

AU - Sim, Hyun Sik

AU - Jeon, Jae Wook

PY - 2022/7

Y1 - 2022/7

N2 - In the original publication of the article, the third author’s affiliation was published incorrectly. The correct affiliation is given in this correction. The original article has been corrected.

AB - In the original publication of the article, the third author’s affiliation was published incorrectly. The correct affiliation is given in this correction. The original article has been corrected.

UR - https://www.scopus.com/pages/publications/85113455668

U2 - 10.1007/s13391-021-00311-x

DO - 10.1007/s13391-021-00311-x

M3 - Comment/debate

AN - SCOPUS:85113455668

SN - 1738-8090

VL - 18

SP - 422

JO - Electronic Materials Letters

JF - Electronic Materials Letters

IS - 4

ER -

Correction to: Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process (Electronic Materials Letters, (2021), 17, 3, (250-259), 10.1007/s13391-021-00280-1)

Abstract

Access to Document

Other files and links

Fingerprint

Cite this